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China, Chinese Electron Beam Evaporation Deposition System1 Industrial Products Supplier Manufacturer Details, price list catalog:
China Industrial Products Supplier Manufacturer List Catalog
Coating LineBeam SystemDeposition System
Shanghai Anttrans Technology Co., Ltd
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Product Description Product Description Electron Beam Evaporation Deposition SystemHeating Methods: Resistance/Radiation Heating (Can be used with inert gases and oxygen)Sample Stage Features: Integrated resistance heating and liquid nitrogen coolingDesign Features: Quick-open door and anti-contamination plate for easy maintenanceDeposition Process Control: Fully automated controlSample Stage Movement: Rotation, elevation, translation, and tilting capabilitiesInterconnection Options: Compatible with PLD/Magnetron Vacuum Systems via loading chamber/glove boxIntegration Options: Can be integrated with thermal evaporation/ion beam-assisted depositionUltra-High Vacuum Compatibility: Available as an optionProduct Parameters Equipment Parameters:ParameterDescriptionVacuum Chamber Dimensions450mm×450mm×500mm, 500mm×500mm×700mm, 600mm×600mm×1000mmChamber Material304/316 Stainless Steel, ElectropolishedVacuum SystemMolecular Pump/Cryopump + Mechanical PumpUltimate Vacuum9×10-6Pa / 9×10-7PaE-Type Electron GunVoltage 6KV-10KV, with XY deflection scanningCrucible Options4-well, 6-well, 8-well, and ring types available; 12cc, 22cc, 40cc, etc.Power6KW~10KW, other power options available upon requestSubstrate Size2-4 inches, 2-6 inches, 2-8 inchesHeating TemperatureUp to 900oCCooling StageWater-cooled/liquid nitrogen cooling, with temperature control from -150oC to room temperatureRotation/TiltingRotation and tilting capabilitiesFilm Thickness MonitoringFilm thickness measurement accuracy: 0.03?, deposition rate measurement accuracy: 0.1?/S; imported and domestic options available based on customer needsElectrical Control SystemPLCAlarm and ProtectionComprehensive program interlocking, complete anti-misoperation design and protectionProcess GasesOptionalCooling SystemWater flow, water pressure, and water temperature monitoringHigh-Throughput FunctionalityOptionalOptional FeaturesLoading chamber/ion beam-assisted deposition/glove box/thermal evaporation/vacuum interconnectionDetailed Photos
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