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China, Chinese Three Source High Vacuum Thermal Evaporation Coater for Solar Battery1 Industrial Products Supplier Manufacturer Details, price list catalog:
China Industrial Products Supplier Manufacturer List Catalog
Coating MachineryCoating MachinePVD Coating Machine
HENAN RUNJING INSTRUMENT EQUIPMENT CO.,LTD
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Product Description Product DescriptionThis equipment is a high-vacuum coater with three evaporation sources. The equipment adopts a front door type vacuum chamber design, which has a large chamber space and strong expandability, which can meet the evaporation coating of multi-style and large-size samples. The chamber is equipped with an upper sample stage, and the clamping or clamping sample mounting parts can be selected according to the user's sample style. The sample stage is rotatable, heated, and all operations are integrated through the touchscreen. The vacuum pump group of the equipment is a two-stage vacuum system, which consists of a bipolar rotary vane vacuum pump and a turbo molecular pump, which can provide a clean and oil-free high vacuum environment for vacuum coating experiments; the vacuum system contains a complete pneumatic valve system, users can One-button operation through the touch screen realizes operations such as vacuum extraction, non-stop sampling, and complete shutdown.Detail intruduction:There are three groups of evaporation sources in this equipment, which are tungsten boat evaporation sources and water-cooled copper electrodes, which can support a maximum current of 260A, and the heating temperature can reach up to 1800oC. It can realize the evaporation of various refractory metals. The three groups are independent Thermal evaporation source, will not cause mutual contamination of plating materials. The equipment adopts an integrated design, the cavity and the electric control part are separated left and right, which realizes the separation of water and electricity, and effectively ensures the safety of users. The electronic control part adopts the design of the combination of touch screen and button panel. Auxiliary functions such as vacuum system and sample stage are operated by one button on the touch screen, and power-on evaporation and film thickness control are operated independently through the panel, which is as convenient as possible for users at the same time. Avoid the possibility of misuse. The equipment has perfect design and excellent performance, and is a must-have for high-precision evaporation coating experiments in laboratories.Three Source High Vacuum Evaporation Coater Application areas:Metal and Dielectric Films,Manufacture of thin film sensors,Optical element,Nano and Microelectronics,Solar batteryTechnical parameter: product nameThree Source High Vacuum Evaporation CoaterSample stageSizeMaximum support φ150mm sampleFunctionRotatable, heating up to 500°CEvaporation sourceQuantityTungsten boat x3PowerEach evaporation source is equipped with an independent power supply; three evaporation sources have a total of three independent power suppliesVacuum chamberCavity sizeφ300x400mmObservation windowFront φ100mmCavity material304 stainless steelOpen methodFront doorFilm thickness control (optional)Crystal-type film thickness measuring instrument, optional multi-channel film thickness controllerVacuum systemForeline pumpBipolar Rotary Vane PumpExhaust portKF16Secondary pumpTurbomolecular pumpExhaust portISO160Vacuum measurementResistance + IonizationComposite vacuum gaugeExhaust rateMechanical pump 1.1L/sMolecular pump 600L/sUltimate vacuum1.0E-5PaPower supplyAC 220V 50/60HzPumping rateRotary vane pump: 1.1L/SControl SystemPLC automatic controlOperation interface: touch screen + operation panel(touch screen controls deposition process and fast data entry; user friendly PLC software system, can be updated via network) OtherSupply voltageAC220V,50HzOverall size1200mm X 900mm X 1650mmTotal power5kWTotal Weight500kg
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