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China, Chinese Small Plasma Sputtering Coater with Rotary Heating Stage & Water Chiller1 Industrial Products Supplier Manufacturer Details, price list catalog:
China Industrial Products Supplier Manufacturer List Catalog
Coating MachineryCoating MachinePVD Coating Machine
HENAN RUNJING INSTRUMENT EQUIPMENT CO.,LTD
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Product Description Product DescriptionThis type of small plasma sputtering coating machine adopts two-stage sputtering method, which is widely used for SEM sample preparation or metal coating experiment. Using low-temperature plasma sputtering process, there is no high temperature during the coating process, and it is not easy to produce thermal damage. This small plasma sputtering coater uses PLC control system, all touch screen operation, easy to learn and use. This equipment is equipped with a rotatable heating sample stage, which can improve the uniformity of the coating and the adhesion of the film. This small plasma sputtering instrument uses a PLC control system, all touch screen operation, easy to learn and use. The equipment is small in size and beautiful in appearance, making it the best choice for laboratory coating experiments.Technical parameters of small plasma sputtering coater:Sample stageSize100mm Rotating speed1~20rpm adjustableHeating temperature≤500oCTemperature control accuracy±1oC PID temperature controlPlasma sputtering sourceQuantity2 inchesx1Cooling methodWater coolingVacuum chamberChamber sizeφ180mm x 210mm Observation windowOmnidirectional visibilityChamber materialHigh purity quartzOpen methodTop cover removableUpper and lower cover material304 stainless steelPumping portKF16Intake port1/4 inch ferrule connectorPower configurationQuantityDC power supplyx1Output powerMax. 150WSputtering power1200VMax. sputtering current50mAVacuum systemVacuum pump typeDual-stage rotary vane vacuum pumpPumping portKF16Exhaust interfaceKF16Pumping rate1.1L/s(4m3/h)Ultimate vacuum≥0.1PaVacuum measurementResistance vacuum gaugeOthersPower supplyAC 220V 50HzTotal power2kWDimension500mm x 320mm x 470mmWeight30kg
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