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China, Chinese Desktop Single Target DC Magnetron Sputtering Coater1 Industrial Products Supplier Manufacturer Details, price list catalog:
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Thermal Spray EquipmentPowder Coating MachineCoating Machine
HENAN RUNJING INSTRUMENT EQUIPMENT CO.,LTD
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Product Description Magnetron sputtering coating equipment is a special laboratory coating machine developed by our company. The equipment can be equipped with DC power supply and RF power supply. The power ranges from 500W to 1000W. It can be used to prepare single or multilayer ferroelectric thin films, conductive films, alloy films, semiconductor films, ceramic films, dielectric films, optical films, etc.Compared with the conventional plasma sputtering, magnetron sputtering has the advantages of high energy, high speed, high deposition rate and low sample temperature rise. The magnetron target is equipped with water-cooled interlayer. The water cooler can effectively take away heat and avoid heat accumulation on the target surface, so that the magnetron coating can work stably for a long time.After compact design, the balance of volume and performance is realized, the appearance is beautiful and the function is comprehensive. The whole machine is controlled by touch screen and built-in one button coating program, which is easy to operate and is an ideal equipment for preparing thin films in laboratory.Single target DC magnetron sputtering coater technical parameters: Power supplyAC220V,50HzWhole power6KWUltimate vacuum5x10-4PaSample table parametersSizeφ150mmHeat temp500oC max.Temp control±1oCRotation speed1-20rpm adjustableMagnetron sputtering head parametersQuantitySize:2 inches x1Cooling modeWater cooled, flow 10L/min requiredWater chiller10L/min Circulating water coolingVacuum chamberSizeφ300mm x 340mm HMaterialSUSWatch windowφ100mmOpening modeopen type, easy to replace targetGas flow controllerOne-channel,200sccm Ar;Vacuum pumpA molecular pump system, pumping 600L/SQuartz vibrating film thickness gaugeOne set, resolution 0.10 angstromSputter power sourceDC power supply:500W, Suitable for preparing metal filmsOperating modeAll-in-one computer operationOverall Dimensions1090mm x 900mm x 1250mmTotal weight350kg
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