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China, Chinese Lab Desktop Single-Target Magnetron Coating Equipment with RF Power Supply1 Industrial Products Supplier Manufacturer Details, price list catalog:
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Thermal Spray EquipmentPVD Coating MachineCoating Machine
HENAN RUNJING INSTRUMENT EQUIPMENT CO.,LTD
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Product Description Desktop single-target magnetron coater with RF power supply is a desktop single-target magnetron sputtering coater,it can be used in the preparation of metal film,and also used in electronic fields,optical fields,special field of ceramic preparation,it surely can be used in SEM sample preparation in laboratory.This model is equipped with RF power supply, especially suitable for coating of non-metallic or other non-conductive materials. Desktop single-target magnetron coater Structure setting:This set is equipped with high vacuum stainless steel cavity, the cavity is set with a quartz observation window baffle, which is easy to observe and record the experiment; The cavity design with excellent vacuum performance and small shape makes it very suitable for laboratory use. At the same time, the equipment is equipped with a rotating heating sample table, which can effectively improve the film uniformity and film quality. The machine adopts modular design, simple operation logic, intuitive operation interface, easy to get started.Desktop single-target magnetron coater technical parameter:Product NameDesktop single-target magnetron coater with RF power supplyProduct ModelRJ-MSZ190-1-RF-SSInstallation Condition1,Working environment temperature: 25oC±15oC,humidity: 55%Rh±10%Rh;2,Equipment power supply:AC220V,50Hz, must be well grounded;3,Rated power:1500w;4,Equipment for gas:The equipment chamber should be filled with argon gas for cleaning. The customer should prepare argon gas with purity ≥99.99%.5,Table size requirements: 600mm×600mm×700mm,bearing capacity ≥ 80kg;6,The position should be well ventilated and cooled.Technical Indicators1, Sputtering power supply:DC power supply 300W;maximum output voltage 600V,limited current output 500mA2, Magnetron target:2 inch balance target,magnetic coupling baffle;3, Suitable target material: φ50mm x 3mm in thickness4, Cavity size :outside diameter194,inside diameter186mm x height 230mm5, Cavity material: 304 stainless steel6, Rotating heating sample table:rotate speed 1~20rpm continuously adjustable;maximum heating temperature 500oC,the lowest recommended heating rate 10oC/min,the highest recommended heating rate 20oC/min.7, Cooling mode :magnetic target and molecular pump require circulating water cooler8, Water-cooling machine:the tank volume 9L,flow rate 10L/min9, Gas supply system:mass flow meter, type of gas Argon,flow 1~30sccm(customizable)10, Accuracy of flow meter :±1.5% measuring range11, The air pumping interface of the vacuum chamber is KF2512, Air intake interface is 1/4 inch double ferrule joint13, Touch screen is 7inch color touch screen14, Adjustable sputtering current,sputtering safety current value and safety vacuum value can be set;15, safety protection: over current, vacuum is too low automatically cut off the sputtering current16, Ultimate vacuum:5E-4Pa(matching molecular pump);17, Vacuum measurement is Parana vacuum gauge,the range is:1~105PaNotice1,Magnetron sputtering has a high working vacuum, generally within 2Pa, and needs to be used with molecular pump. 2,In order to achieve a high oxygen free environment, the vacuum chamber should be cleaned at least 3 times with high purity inert gas.3,Magnetron sputtering is sensitive to the air intake, so mass flow meter is needed to control the air intakeOptional accessoryFilm thickness monitor1,Film thickness resolution:0.0136?(aluminum)2,Accuracy of film thickness :±0.5%,it depends on process conditions, especially sensor position, material stress, temperature and density 3,Measuring speed:100ms-1s/times,measurement range can be set :500000?(aluminum)4,Standard sensor crystal:6MHz5,Suitable for wafer frequency:6MHz suitable for wafer size:Φ14mmmounting flange:CF35Another accessory1,RJ-CZK103 series high performance molecular pump set(including composite vacuum gauge, measuring range 10-5Pa~105Pa)RJ-GZK60 series small molecular pump set(including composite vacuum gauge, measuring range 10-5Pa~102Pa)VRD-4 bipolar rotary vane vacuum pump2,KF25 Vacuum bellows; The length can be 0.5m, 1m or 1.5m. KF40 clamp bracket3,Film thickness meter crystal oscillator;
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