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China, Chinese PVD Coating Thermal Evaporator with Glove Box for Lithium Battery Fabrication Coating1 Industrial Products Supplier Manufacturer Details, price list catalog:
China Industrial Products Supplier Manufacturer List Catalog
Thermal Spray EquipmentPowder Coating EquipmentPVD Coating Machine
HENAN RUNJING INSTRUMENT EQUIPMENT CO.,LTD
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Product Description Introduction of high vacuum evaporation coater:The coating equipment is mainly based on metal/organic source evaporation. It is suitable for the preparation of metal elements, oxides, dielectrics, semiconductor films, etc. in the laboratory. It can also be used for teaching and pre-process testing of production lines. , the expansion space is large, suitable for and meet the teaching and research work of colleges and universities.II. The basic structure:The coating equipment consists of vacuum chamber, metal/organic source system, sample stage system, vacuum pump set, film thickness monitor system, equipment rack, and electronic control system. The front door of the vacuum chamber can be connected to the glove box, and an integrated design scheme is adopted. The whole set of equipment is compact in structure and simple in layout, so as to avoid the messy appearance of experimental equipment.1. Vacuum ChamberParameterSpecificationAppearance1 set of high-quality 304 stainless steel D-shaped vacuum chamber. Internal dimensions: D400×480mm. Equipped with front and rear double doors. The rear door adopts a hinged square door for easy cleaning, internal debugging, maintenance, and sample handling. The front door uses a horizontally sliding square door. Each front and rear door is equipped with 1 set of DN100 windows.Bottom2 sets of metal source interfaces, 4 sets of organic source interfaces, 1 set of molecular pump interface, 2 sets of lighting interfaces, and 3 sets of film thickness probe interfaces.Top1 set of sample stage interface, 1 set of electric baffle interface, 1 set of high vacuum pneumatic gate valve interface.Left side1 set of high vacuum pneumatic flapper valve interface. 2. Metal/Organic Source SystemParameterSpecificationMetal sourceQuantity: 2 sets. 2 sets of water-cooled copper electrodes, compatible with evaporation boats (tungsten, molybdenum, and tantalum boats) and spiral wires. Equipped with pneumatic baffles. 1 set of 1KW DC constant current power supply (digital display), current adjustment accuracy 1A (fine adjustment). Suitable for evaporation of common metals and metal oxides.Organic sourceQuantity: 4 sets. 4CC quartz boat, 2 temperature control power supplies (temperature control meter display accuracy 0.1°C). Temperature range: RT~500°C (temperature control accuracy ±1°C), with pneumatic baffle.BaffleThe evaporation sources are independent of each other, and the baffles are separated to avoid cross-contamination. 3. Sample Stage SystemParameterSpecificationSubstrate rotationSpeed continuously adjustable from 0~30 rpm.Substrate liftingElectric lifting. The distance between the substrate and the evaporation source is continuously adjustable from 200~300mm via the touch screen.Sample holder20×20mm substrate, 8 pieces.Substrate shutterElectric shutter. 4. Vacuum SystemComponentSpecificationVacuum pump set1) 1 set of 600L/s molecular pump; 2) 1 set of 8L/s rotary vane pump; 3) 1 set of CF150 high vacuum pneumatic gate valve; 4) 1 set of CF40 high vacuum pneumatic flapper valve; 5) 2 sets of KF16 high vacuum pneumatic flapper valves; 6) 1 set of KF40 high vacuum pneumatic flapper valve; 7) 1 set of KF40 vacuum solenoid valve; 8) 2 sets of KF40 pump valve connecting hoses, 1 set of KF40 tee; 9) 1 set of digital vacuum gauge (measurement range: 1×10~1×10 Pa). 5. Film Thickness Monitor SystemComponentSpecificationFilm thickness meter1 set of three-channel quartz crystal film thickness monitor.Film thickness probe3 sets of CF35 water-cooled film thickness probes. 6. Equipment RackComponentSpecificationFrame1 set of 40 carbon steel square tube welded frame.Mobility4 universal wheels for movement and adjustment.Stabilization4 M16 feet for locking and positioning. 7. Electronic Control SystemComponentSpecificationPower supply of metal source1 set.Power supply of organic source2 sets (one for two).Evaporation source baffle power supply1 set. 8. Other ParametersParameterSpecificationPhase loss protectionIncludes misoperation protection, linkage interlock, and one-key vacuum start/stop functions.Power supply~220V two-phase power supply system (peak 3KW).Water supplySmall chiller, cooling water temperature 5°C~35°C. Operating environment temperature: 10°C~40°C.Air supplySmall oil-free silent air pump, providing 0.2~0.3MPa air pressure to drive pneumatic valves.Ultimate vacuum6×10 Pa. Time from atmosphere to 6×10 Pa: <35 minutes (filled with dry nitrogen). After 12 hours shutdown, vacuum level ≤10 Pa.
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