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China, Chinese Dual Chamber Pulse Laser Coating Machine1 Industrial Products Supplier Manufacturer Details, price list catalog:
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Thermal Spray EquipmentPowder Coating MachinePowder Coating
HENAN RUNJING INSTRUMENT EQUIPMENT CO.,LTD
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Product Description Dual chamber pulse laser coater is used for growing optical crystals, ferroelectrics, ferromagnets, superconductors and organic compound thin film materials, suitable for growing high melting point, multi-elements and complex layered superlattice thin film materials containing gas elements. It is widely used in the research and manufacture of thin film materials in colleges and universities.Dual chamber pulse laser coater specifications:Main vacuum systemSphere structure, size: dia. 450mmLoading sample systemVertical cylindrical stucture, size: dia. 150×150mmVacuum system configurationMain vacuum chamberMechanical pump, molecular pump, valveLoading sample systemMechanical pump and molecular pump(sharing with primary chamber), valveUltimate pressureMain vacuum system≤6*10-6Pa(after baking and degassing)Loading sample system≤6*10-3 Pa(after baking and degassing)Vacuum recovery systemMain vacuum systemIt can reach 5x10-3Pa in 20 minutes (the system is exposed to the atmosphere for a short time and filled with dry nitrogen to start pumping)Loading sample systemIt can reach 5x10-3Pa in 20 minutes (the system is exposed to the atmosphere for a short time and filled with dry nitrogen to start pumping)Rotating target platformThe maximum size of the target is about 60mm. Four target materials can be installed at one time, target changing in revolution motion; each target can rotate independently, rotation speed: 5-60 rpmSubstrate heating platformSample sizeDia. 51Mode of motionSubstrate rotates continuously, rotation speed:5-60 rpmHeating temperatureMaximum temperature of substrate heating: 800oC±1oC, Controlled and adjustableGas circuit system1-circuit mass flow controller, 1-circuit inflation valveOptional accessoriesLaser deviceCompatible with coherent 201 laserLaser beam scanning device2D scanning mechanical platform, perform two degree of freedom scanning.Computer control systemThe contents of control include common conversion target, target rotation, sample rotation, sample temperature control, laser beam scanning, etc.Floor SpaceMain unit1800 * 1800mm2Electric cabinet700 *700mm2(one)
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