IPDB › China Industry › Manufacturing & Processing Machinery
China, Chinese Lab Magnetron Sputtering Coating Equipment with Triple-Target Source and UPS Backup Coating1 Industrial Products Supplier Manufacturer Details, price list catalog:
China Industrial Products Supplier Manufacturer List Catalog
Thermal Spray EquipmentPowder Coating MachinePowder Coating
HENAN RUNJING INSTRUMENT EQUIPMENT CO.,LTD
Preview:
Product Description Three target magnetron sputtering coater is a cost-effective magnetron sputtering coating equipment independently developed by our company. this magnetron sputtering coater is standardized, modular and customizable.This device can be used for preparing single-layer or multi-layer ferroelectric thin films, conductive films, alloy films, semiconductor films, ceramic films, dielectric films, optical films, oxide films, hard films, PTFE films, and the like. Compared with similar equipment, this three-target magnetron sputtering coater is not only widely used, but also has the advantages of small size and easy operation, and is an ideal equipment for preparing material films in a laboratory.Technical parameters of Three target magnetron sputtering coater:product nameThree sputter sources magnetron sputtering coater with UPSProduct numberRJ-MSH325-III-RFRFRF-UPS-SSSupply VoltageVAC 220, 60HzUPS20KVA 16KW, 1 hour delay16 batteries, with capacity of 38AHVacuum ChamberDimension: Dia. 325 mm * H 385 mmMaterial: 304 stainless steelViewport (Window): ~4'' (100mm) with shutterSample StageTop sample holderSample table: Dia. 150mmSample size: Max. 4'' diameterRotary speed: 0-40rpm adjustableHeating temperature: up to 700oCWater ChillerWater flow rate: 2.3m3/hPower: 3PCooling Capacity: 8250Kcal/hCompressor output power: 2.25KWMagnetron Sputtering Gun3× 2'' magnetron sputter guns, with automatic shutterSputtering orientation upwardsTarget diameter: 2''Magnets: rare earth magnetRF Generator3 × RF 300W power supply with auto matchPower output range: 5W~300WMaximum reflected power: 100WPower stability: ±0.1%Harmonic component: ≤-50dbcPower supply: Single phase 187-253 VAC, 50/60HZEfficiency: ≥70%Power factor: ≥90%Reflected power (at maximum power): <3WMaximum load current: 30ARMSMaximum load voltage: 7500VRMSRF output connector: 50 Ω, L29 or customizedMatch time: 1~3sReal part range of matched impedance: 0~80ΩImaginary part range of matched impedance:-200j~+200jCooling method: forced coolingMass Flow Meter3 × MFC mass flow control (Ar, O2 and N2)Measuring ranges: up to 20sccmWith pneumatic isolation valve(s) and filter.Full Automatic control by PC or PLC, to controlStore for minimum 100 recipe 19'' Flat controller
Purchasing Request
Note: Send your purchase request, and we will screen suppliers or manufacturers for you free of charge...