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China, Chinese Advanced Vacuum Magnetron Sputtering Coating Equipment for Laboratories1 Industrial Products Supplier Manufacturer Details, price list catalog:
China Industrial Products Supplier Manufacturer List Catalog
Spraying MachineCoating MachinePVD Coating Machine
HENAN RUNJING INSTRUMENT EQUIPMENT CO.,LTD
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Product Description ParameterSpecificationCustom Manufacturing SupportYesVacuum ChamberΦ245 × H300 mmVacuum System600L/s Molecular Pump + Rotary PumpUltimate Vacuum3.0×10<sup>-5</sup> PaPumping Speed≤20 min to 10<sup>-4</sup> PaMax. Coatable Substrate SizeΦ80 mmSputtering Target2-inch (60 mm)Sputtering Power SupplyDC/RFGas Flow System50 sccmControl SystemPLC + TouchscreenKey Features:★ Manually lift-off vacuum chamber cover for convenient substrate handling, target replacement, and routine maintenance.★ Main pump: High-pumping-speed compound molecular pump; Foreline pump: Rotary vane pump.★ Rotating substrate stage with magnetic fluid rotary feedthrough, steplessly adjustable rotation speed (0-25 rpm). ParameterSpecificationCustom Manufacturing SupportYesVacuum ChamberΦ245 × H300 mmVacuum System600L/s Molecular Pump + Rotary PumpUltimate Vacuum3.0×10<sup>-5</sup> PaPumping Speed≤20 min to 10<sup>-4</sup> PaMax. Coatable Substrate SizeΦ80 mmSputtering Target2-inch (60 mm)Sputtering Power SupplyDC/RFGas Flow System50 sccmControl SystemPLC + TouchscreenKey Features:★ Manually lift-off vacuum chamber cover for convenient substrate handling, target replacement, and routine maintenance.★ Main pump: High-pumping-speed compound molecular pump; Foreline pump: Rotary vane pump.★ Rotating substrate stage with magnetic fluid rotary feedthrough, steplessly adjustable rotation speed (0-25 rpm).
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