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China, Chinese TMAXCN Brand- VTC-100PAX 12500 RPM Ultra-Hi Speed Spin Coater for 4" Max with Vacuum Chuckr Rotary Coating Machine1 Industrial Products Supplier Manufacturer Details, price list catalog:
China Industrial Products Supplier Manufacturer List Catalog
Coating MachineryUltra-Hi Speed Spin CoaterRotary Coating Machine
Xiamen Tmax Battery Equipments Limited
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Product Description 12500 RPM Ultra-Hi Speed Spin Coater Rotary Coating Machine for 4" Max with Vacuum Chuck- VTC-100PAX VTC-100PAX is an ultra-fast spin coater up to 12500 rpm for Max. 5" dia. wafer. The spin head actuator is a precision DC servo motor with accurate speed and acceleration control. The substrate can be held by vacuum (for thinner objects). The device has an LCD display for programming various parameters up to 12 programs and 6 segments. Spin duration, spin speed, and acceleration can be programmed from the front panel. All components in the device are corrosion protected to make it cleanroom compatible. The spin-coater can be used in the glovebox with Ar gas.SpecificationsMain Features500 ~ 12500 RPM spinning speed programmable ( 13000 max for < 60 seconds)Accept substrate from 10 mm to 5" PP chamber for anti-corrosive operation.One gas inlet port on top of the cover can fill inert gas during coatingOne 20ml Plastic Syringe is includedSuitable using Ar gas (vacuum pump must be outside glovebox)The safety interlock is integrated into the lidVacuum ChuckChamber size: 150 mm diameter 2 sets of Aluminum vacuum chucks of different sizes can hold the substrate from 20mm to 100 Dia. Vacuum Pump (Optional)One compact oilless vacuum pump is optional. The feedthrough is needed for the vacuum pump to use in the Ar glovebox equipment. The vacuum pump has to be placed outside of the glove box. The feedthrough is not included. Control PanelThe digital control panel can store 12 programs and each program has 6 segments programmable for speeds, acceleration, and spin duration.Speed: 500 rpm - 12500 rpm programmableDuration: 0 - 999 seconds for each segmentAcceleration: 100 - 2000 rpm / sec adjustableSpeed Accuracy: < 5%Input PowerAC 110V or 220V is selectable ( please confirm before order )1000 W total for the oilless pump and spin cater24VDC high-speed motorNet Weight12 KgShippingShipping Dimension: 40"(L) x 30"(W) x 30"(H)Shipping Weight: 46 kg (100 lbs)Gas Inlet6mm diameter gas inlet port allows customers to fill desired gas into the chamber, which can make coating under an inert gas flow environment.Liquid Injection Standard Package: 20ml plastic syringe with needle is included Pic. 1 May consider the options belowOption 1: Precision Electronic Single Channel Pipette: 20 - 200uL (Pic. 2)Option 2: Heatable glass syringe with temp. controller, up to 200C (Pic. 3)Option 3 Heating cover for drying up to 120 C (Pic. 4) ComplianceRusting and damage due to improper storage conditions or maintenance are not covered by a warrantyALL electric parts are CE, NRTL, and no need for extra certification WarningsDo not over flush the water bowl/base with any kind of liquid. Excess liquid will leak into the motor shaft and cause damage. Please use a fabric cloth to wipe out the residues that remain in the bow/base.If necessary, turn on the water outlet when flushing the water bowl/base to avoid liquid overflowing during the operation.For more details about the cleaning procedure, please review the cleaning instruction for the spin coaters. Product Image Certifications
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