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China, Chinese TMAXCN Brand-VTC-EV3-GB Thermal Evaporation Coater Evaporating Coating System in Glovebox for 4" Wafer with 3 Crucible & Temperature Control1 Industrial Products Supplier Manufacturer Details, price list catalog:
China Industrial Products Supplier Manufacturer List Catalog
Metal Coating MachineryEvaporation CoaterThermal Evaporation Coater
Xiamen Tmax Battery Equipments Limited
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Product Description Thermal Evaporation Coater Evaporating Coating System in Glovebox for 4" Wafer with 3 Crucible & Temperature Control VTC-EV3-GB VTC-EV3-GB is a thermal evaporating system in the glovebox with a total of 3 evaporating sources and precision temperature control. Three evaporating crucibles could be used to grow multilayer films one by one in the same chamber atmosphere. The system is suitable for coating most of the film of the metallic and organic material up to 4" in size from 200 oC - 1700 oC with a B-type thermocouple. SpecificationsStructure & FeaturesThe quartz vacuum chamber (O.D 280 x I.D 260 x H310 mm is installed at the bottom of the glove box for handling air-sensitive material 4" Dia rotatable sample holder with 90 mm height adjustable for the uniform film coatingTungsten coil heater and alumina crucible for high-temperature coating up to 1700 oCPrecision temperature control with 30 programmable segments and +/- 1 oC accuracyA high vacuum can be achieved up to 1.0E-5 Torr via optional turbopumpThe glove box with purification system to ensure oxygen and humidity are less than 1 ppm ) PowerEvaporation coaterInput voltage: AC110 V 50/60 Hz, single-phaseInput Power: 1,200 W ( coater only)output power:: 12 V, and 30 A max current. Recommended working current <30 AGlovebox:Input voltage: AC110 V 50/60 Hz, single-phaseInput Power: 1,500 W ( coater only)Temperature Control & Heaters Three 3 mL Alumina Evaporating Crucibles with Tungsten coil are included Three sources can be heated one by one to achieve a multi-layer coating 3 pcs B-type thermocouple (installed in each crucible) - heating from 200oC - 1700 oC (PIC. 1-2 )One digital temperature controller with 30 programmable segments and +/- 1 oC accuracy (PIC. 2)Recommend to limit the temperature heating / cooling rate to 0.3 oC/s (or 20 oC/min) below 1200 oC, and limit to 0.15 oC/s (or 10 oC/min) from 1200 - 1700 oCRotatable Sample HolderOne 4" Dia. rotatable sample stage and its shutter is installed on the top flange for coating a 4 " waferRotating speed: 5 rpmThe distance from the sample holder to the evaporation source is adjustable from 40 mm to 90 mmA water sample holder is available at the extra cost ( recirculating water chiller is required )Film Thickness Analysis System Precise quartz Film Thickness Monitor is optional, which is used for in-situ thickness measurement. Accuracy up to 1? (Pic. 1)Precision Thin Film & Coating Analysis Systems - TFMS-LD is available at extra cost, (Pic.2 )Vacuum The KF40 vacuum port is installed to connect to a vacuum pumpThe vacuum may reach <1E-5 Torr by pumping overnight with optional Turbo-pumpA vacuum pump is required for coating. Please choose from the following Product OptionsDouble Stage Rotary Vane Vacuum Pump with vapor trap to eliminate the oil mist, which can reach vacuum up to 1.0E-2 Torr for evaporating noble metallic materials, such as gold, silver, and organic materials. Anti-Corrosive Capacitance Diaphragm Gauge is includedCompact Turbomolecular Vacuum Pump System is able to provide a vacuum level up to 1.0E-5 Torr for evaporating oxygen-sensitive materials, such as Al. Mg, Li, etc. A combined Pirani and cold cathode gauge are included with the pump to measure vacuum up to 1.0E-8 TorrGas Inlet1/4 tube fitting is built-in for chamber purge or forming gas processingOne needle valve is built-in to control the gas flowing rateOptionalExtra alumina crucible and tungsten coil heater can be orderedQuartz Chamber DimensionO.D.:280mm ( 11") I.D.: 260mm ( 10.2")Length: 310mm ( 12.2")ComplianceCE CertificateNRTL is available upon request Product Image Certifications
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