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China, Chinese Lab Desktop Quartz Cavity Single Target Magnetron Sputtering Coating Equipment1 Industrial Products Supplier Manufacturer Details, price list catalog:
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Thermal Spray EquipmentPVD Coating MachineMachine
HENAN RUNJING INSTRUMENT EQUIPMENT CO.,LTD
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Product Description This equipment is a Desktop quartz cavity single target magnetron sputtering coating instrument,it can be used in the preparation of metal film,and also used in electronic fields,optical fields,special field of ceramic preparation ,it surely can be used in SEM sample preparation in laboratory.This set is single-target magnetron sputtering coater equipped with high vacuum stainless steel cavity, the cavity is set with a quartz observation window baffle, which is easy to observe and record the experiment; The cavity design with excellent vacuum performance and small shape makes it very suitable for laboratory use. At the same time, the equipment is equipped with a rotating heating sample table, which can effectively improve the film uniformity and film quality. The machine adopts modular design, simple operation logic, and intuitive operation interface, easy to get started.Technical Parameters:product nameDesktop quartz cavity single target magnetron sputtering coating instrumentProduct numberRJ-MSZ180-DC-Qsample stage Dimensionsφ100mmVibration frequency20Hz-20000HzMagnetic target gunEquipped with a two-inch magnetic control target, target size: diameter 50.8mm, thickness <=3mmvacuum chambeCavity sizeφ180mm X 200mmobservation windowomnidirectionally transparentCavity material304 stainless steelOpening methodRemovable top coverVacuum system Backing pumpLow noise bipolar rotary vane pumpMolecular pumpLow noise and high pumping speed turbomolecular pumpVacuum measurementComposite vacuum gauge, range: 10-5~105PaAir extraction interfaceKF16Air extraction interfaceKF40Exhaust interfaceKF16System vacuum1.0×10-4PaPower supplyAC 220V 50/60Hz Pumping rateThe pumping speed of the molecular pump is 600L/s, and the pumping speed of the backing pump is 1.1L/s.Power configuration Number of power suppliesA set of DC power supplyOutput PowerDC power supply 300W Other parametersSupply voltageAC220V,50HzTotal power2kWOverall size550mm X 350mm X450mm
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