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China, Chinese Lab RF Plasma Magnetron Sputtering Coater for Non-Conductive Thin Films1 Industrial Products Supplier Manufacturer Details, price list catalog:
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Thermal Spray EquipmentPowder Coating MachinePowder Coating
HENAN RUNJING INSTRUMENT EQUIPMENT CO.,LTD
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Product Description RF plasma magnetron sputtering coater is an excellent and cost effective coater for coating thin film of non-conductive material in RF plasma magnetron sputtering coater is small in size, occupies less laboratory space, simple in operation and widely used. Therefore, it is widely used in the laboratories of major universities and research institutes.RF plasma magnetron sputtering coater specificactions:Input Power220 VAC, 50/60Hz, single phase800 W (including pump)If the voltage is 110 VAC, a 1000 W transformer is requiredSource PowerOne 13.5 MHz, 300 W RF Generator with automatic matching function is built in cabinet and connected to 2" sputtering head Magnetron Sputtering HeadOne 2" Magnetron Sputtering Heads with water cooling jackets are included and inserted into quartz chamber via quick clampOne shutter is built on the flange (manually operated)One 16 L/min digitally controlled recirculation water chiller is installed on bottom cabinet for cooling magnetron sputtering heads.Sputtering TargetTarget size requirement: 2" diameter×1/4"thickness MaxOne SiO2 target is included for demo test.Al2O3 ceramic target Recommend Coating MethodVacuum Chamber Vacuum Chamber: 160 mm OD×150 mm ID ×250 mm Height. made of high purity quartzSealing Flange: 165 mm Dia. made of Aluminum with high-temperature silicone O-ringStainless steel mesh cover is included for 100% shielding RF radiation from chamberVacuum level: 1.0E-2 Torr with included dual stage mechanical pump and 1.0E-5 Torr with optional turbo pumpSample HolderSample holder is rotatable and heat-able made of a ceramic heater with stainless steel coverThe sample holder size: 50 mm Dia. for 2" wafer maxRotation speed is adjustable: 1-10 rpm for uniform coatingThe holder temperature is adjustable from RT to 400°C Max with accuracy +/- 1.0 °C via digital temperature controller.Vacuum Pump Station KF25 Vacuum port is built in for connecting to a vacuum pump.Vacuum level: 1.0E-2 Torr with included dual stage mechanical pumpOverall Dimensions650 mm L x 650 mm W x 1630 mm H Net Weight70 kgWarranty & ComplianceOne years limited warranty with lifetime support
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