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China, Chinese Lab Three Targets Magnetron Sputtering Coater (500W DC&500W RF)1 Industrial Products Supplier Manufacturer Details, price list catalog:
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Thermal Spray EquipmentPowder Coating MachinePowder Coating
HENAN RUNJING INSTRUMENT EQUIPMENT CO.,LTD
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Product Description Three heads magnetron sputtering coater equipment is a special laboratory coating instrument developed by our company. The Magnetron sputtering coater equipment can be equipped with DC power supply and RF power supply. The power ranges from 500W to 1000W. It can be used to prepare single or multilayer ferroelectric thin films, conductive films, alloy films, semiconductor films, ceramic films, dielectric films, optical films, etc.Compared with the conventional plasma sputtering, magnetron sputtering has the advantages of high energy, high speed, high deposition rate and low sample temperature rise. The magnetron target is equipped with water-cooled interlayer. The water cooler can effectively take away heat and avoid heat accumulation on the target surface, so that the magnetron coating can work stably for a long time.After compact design, the balance of volume and performance is realized, the appearance is beautiful and the function is comprehensive. The whole machine is controlled by touch screen and built-in one button coating program, which is easy to operate and is an ideal equipment for preparing thin films in laboratory.Technical parameters of Three heads magnetron sputtering coater:product nameThree targets magnetron sputtering coaterProduct numberRJ-MSH300-III-DCDC-RF-SSPower supplyAC220V, 50HzWhole power6KWUltimate vacuum5x10-4PaSample table parametersSizeφ150mmHeat temp.500oC max.Temp control±1oCRotation speed1-20rpm adjustableMagnetron sputtering head parametersQuantity2-inch x2Cooling modeWater cooled, flow 10L/min requiredWater chiller10L/min Circulating water coolingVacuum chamberSizeφ300mm x 340mm HMaterialSUSWatch windowφ100mmOpening modeopen type, easy to replace targetGas flow controllerOne-channel,200sccm Ar;Vacuum pumpA molecular pump system, pumping 600L/SQuartz vibrating film thickness gaugeOne set, resolution 0.10 angstromSputter power sourceDC power supply: 500W x2, Suitable for preparing metal filmsRF power supply: 500W, Suitable for preparing non - metallic films Operating modeAll-in-one computer operationOverall Dimensions1090mm x 900mm x 1250mmTotal weight 350kg
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