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China, Chinese Single Target Desktop DC Magnetron Sputtering Deposition System for Semiconductor Film1 Industrial Products Supplier Manufacturer Details, price list catalog:
China Industrial Products Supplier Manufacturer List Catalog
Metal Coating MachineryLab Magnetron Sputtering CoatingMagnetron Sputtering Plating Equipment
Zhengzhou Tainuo Film Materials Co., Ltd.
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Product Description Lab Single Target Desktop DC Magnetron Sputtering Deposition System for Semiconductor FilmProduct DescriptionSingle target DC magnetron sputtering coater equipment is a cost-effective magnetron sputtering coating equipment independently researched and developed by our company. It has the characteristics of standardization, modularization and customization. Magnetron targets can be selected from 1 inch, 2 inches and 3 inches, and customers can choose according to the size of the plated substrate; The power supply is a 1500W high-power DC power supply, which can be used for high-energy metal sputtering coating. According to experimental requirements, DC or RF power supplies of other specifications can also be selected to achieve coating operations of various materials.The coating instrument has two high-precision mass flow meters, and customers can customize the gas path of up to four mass flow meters if they have other requirements to meet the requirements of complex gas environment construction; The instrument is equipped with an advanced turbomolecular pump set as standard, and the ultimate vacuum can reach 1.0E-5Pa. At the same time, other types of molecular pumps are available for purchase. The molecular pump's gas path is controlled by multiple solenoid valves, which can open the cavity to take out samples without turning off the pump, which greatly improves your work efficiency. This product can be equipped with an integrated industrial control computer to control the system. The computer program can realize most functions such as the control of the vacuum pump group and the control of the sputtering power supply, which can further improve the efficiency of your experiment.Application scope of single target magnetron sputtering coater:Single target DC magnetron sputtering coater can be used to prepare single-layer ferroelectric films, conductive films, alloy films, etc. Compared with similar equipment, this single-target magnetron sputtering coating instrument is not only widely used, but also has the advantages of small size and easy operation. It is an ideal equipment for laboratory preparation of material thin films, and is especially suitable for laboratory research on solid electrolytes and OLED etc.Product Parameters Single target DC magnetron sputtering coating instrumentSample stageDimensionsφ100mmHeating rangeRoom temperature~500oCAdjustable speed1-20rpm adjustablemagneticcontroltargetgunTarget planeCircular plane targetSputtering vacuum10Pa~0.2PaTarget diameter50~50.8mmTarget thickness2~5mmInsulation voltage>2000VCable specificationsSL-16Target head temperature<=65oCrealnullCavitybodyInner wall treatmentElectrolytic polishingCavity sizeφ354mm × 300mmCavity material304 stainless steelObservation windowQuartz window, diameter φ100mmOpen methodTop opening, cylinder auxiliary supportgasbodycontrolsystemFlow controlMass flow meter, range 0~200SCCM argon gasControl valve typeSolenoid valveControl valve static stateNormally closedMeasuring linearity±1.5%F.SMeasurement repeatability±0.2%F.SMeasuring response time≤8 second(T95)Working pressure range0.3MPaValve body pressure3MPaWorking temperature(5~45)oCBody materialStainless steel 316LValve body leakage rate1×10-8Pa.m3/sPipe joints1/4″Compression fittingInput and output signal0~5VPower supply±15V(±5%)(+15V 50mA, -15V 200mA)Overall dimensions mm130 (width) × 102 (height) × 28 (thickness)Communication InterfaceRS485 MODBUS protocolDC power supplyPower500WOutput voltage0~600VTiming length65000 secondStart Time1~10 secondFilm thickness measurementPower requirementsDC:5V(±10%) Maximum current 400mAResolution±0.03Hz(5-6MHz),0.0136? / Measurement (aluminum)Measurement accuracy±0.5% thickness + 1 countMeasurement period100mS~1S/time (can be set)Measuring range500,000 ? (aluminum)Crystal frequency6MHzCommunication InterfaceRS-232/485 serial interfaceDisplay digits8-digit LED displayMolecular pumpMolecular pump pumping speed80L/SRated speed65000rpmVibration value<=0.1umStart Time<=4.5minDowntime<7minCooling methodAir-cooled Cooling water temperature<=37oCCooling water flow rate1L/minInstallation directionVertical ±5°Suction port150CFExhaust connectionKF40Fore pumpPumping rate1.1L/S(VRD-4)Ultimate vacuum5×10-2PaPower supplyAC:220V/50HzPower400WNoise <=56dbSuction portKF40Exhaust connectionKF25Release valvePneumatic and electronically controlled air release valve is installed on the vacuum chamberThe ultimate vacuum of the whole machine<=1.0×10-4PaVacuum chamber boost rate<=2.5Pa/hSoftware system1 set of monitoring and management softwareTest target2 copper targets with a diameter of 2 inches and a thickness of 3 mmDetailed PhotosNotes:1. We have magnetron sputtering coater with 1 target, 2 targets, 3 targets, target can be designed at the top or bottom of the chamber.2. DC power or RF power target is available3. Different target material is optional4. Strong magnetic target and Permanent magnetic target is optional5. Magnetron sputtering coater with evaporation source is available6. Customized service is always available! Company Profile FAQQ. Are you a manufacturer or a trading company?A. We are professional laboratory instrument manufacturers, having our own design team and factory with mature technical experience, and can guarantee the quality of products and the optimal price.Q. How is your company's product after-sales service system?A. The product warranty period is 12 months, we can provide lifetime maintenance. We have professional pre-sales and after-sales departments that can respond to you within 24 hours to resolve any technical issues.Q. How long is your delivery time? If I want to customize the instrument, how long does it take?A.1. If the goods are in stock, it is 5-10 days. 2. We can provide customized services for our customers. It usually takes 30-60 days depending on the specifications of the custom instrument.Q. Our country's power supply and plug are different. How do you solve it?A. We can supply a transformer and plug according to your local requirements according to the power plug of different countries.Q. How to pay?A.T / T, L / C, D / P, etc., it is recommended to use Made in China Trade Guarantee.Q. How is the package of goods? Delivery methods?A.1. Standard export fumigation sign wooden box packaging 2. Express, air, sea shipping according to customer requirements, find the most suitable way.More questions, please contact us.
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