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China, Chinese Lab Small Double Sputter Source Magnetron Sputtering Coater1 Industrial Products Supplier Manufacturer Details, price list catalog:
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HENAN RUNJING INSTRUMENT EQUIPMENT CO.,LTD
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Product Description RJ-MSZ210-II-DCRF-SSsmall dual-target magnetron sputtering coater equipment has been miniaturized, while retaining the high-vacuum stainless steel cavity, while simplifying other mechanisms, greatly reducing the installation site requirements. The magnetron sputtering coater equipment is equipped with a DC power supply and an RF power supply. The DC target can be used for sputtering of metals and other conductive materials. The RF power supply can be used for sputtering of various non-metals and metal oxides. The equipment vacuum system adopts all imported vacuum pumps, with fast pumping speed, high ultimate vacuum and excellent vacuum performance. The equipment has compact structure, perfect functions and easy to use. It is very suitable for various coating tests.Technical parameters of magnetron sputtering coater equipment:product nameSmall double sputter source magnetron sputtering coaterProduct numberCY-MSZ210-II-DCRF-SSSample stageSizeφ150mmRotating speed0-20 adjustableHeatingUp to 500oCMagnetron sputtering targetQuantity2" x2 dual targets share a baffleVacuum chamberChamber sizeφ210mm x 230mmChamber materialSS304 stainless steelObservation windowφ40mmOpening methodFront doorVacuum systemMechanical pumpImported oil-free diaphragm pumpPumping interfaceKF16Molecular pumpImported molecular pumpPumping interfaceKF40Exhaust interfaceKF16Vacuum measurementResistance gauge + ionization gaugeUltimate vacuum1.0E-3PaPumping rateOil-free pump 0.49L/s Molecular pump: 40L/SPower supplyAC 220V 50/60HzPower configurationQuantityDC power supply x1RF power supply x1Maximum output powerDC power supply 500WRF power supply 500WOtherSupply voltageAC220V, 50HzTotal power2kWOverall size550mm x 550mm x1100mmDisclaimer: The product introduction content (including product images, product descriptions, technical parameters, etc.) of this site is for reference only. As the update may not be timely, there will be some differences between the content and the actual situation. Please contact our sales staff to confirm. The information provided on this site does not constitute any offer or promise, and the company will periodically improve and modify the website information, without prior notice, please understand.
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