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China, Chinese Lab Dual Target Upper Sputtering DC RF Magnetron Sputtering Coating Equipment1 Industrial Products Supplier Manufacturer Details, price list catalog:
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Thermal Spray EquipmentPowder Coating MachinePowder Coating
HENAN RUNJING INSTRUMENT EQUIPMENT CO.,LTD
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Product Description RJ-MSP500S-DCRF-B is a special laboratory coating machine with two targets developed by our company. this magnetron sputtering coater machine is equipped with a DC power supply and a RF power supply. this magnetron sputtering coater machine can be used to prepare single or multi-layer ferroelectric thin films, conductive films, alloy films, semiconductor films, ceramic films, dielectric films, optical films, etc.Features of magnetron sputtering coater:a. Compared with the conventional plasma sputtering, magnetron sputtering has the advantages of high energy, high speed, high deposition rate and low sample temperature rise;b. The magnetron target is equipped with water-cooled interlayer. The water cooler can effectively take away heat and avoid heat accumulation on the target surface, so that the magnetron coating can work stably for a long time;c. This model adopts the layout of under target, the sample table is on the top, and the height with the target surface can be precisely adjusted by program, and can be rotated and heated, with excellent performance.Technical parameters of magnetron sputtering coater:ModelRJ-MSH500-II-DCRF-SSInputAC220V,50HzTotal power6KWUltimate vacuum degree5x10-4PaSample table parametersSize150 Dia.Height70 mm adjustableHeating≤500oCRotation speed1-20 rpmMagnetron sputtering head parametersQuantity2-set,2-inchCooling modeWater cooled,required flow rate10L/minWater chiller10L/min circulating water coolingVacuum chamberSize500mm Dia. × 490mm HMaterialStainless steelWatch window100mm Dia.Open modefront opening doorGas flow controller1channel 200sccm Ar;Vacuum pumpMolecular pump system pumping,600L/SFilm thickness gaugeQuartz vibrating film thickness gauge ,one set,Resolution 0.10 ?Sputter power supplyDC power supply:one set,500W,for metal filmsRF power supply:one set,500W,for non-metallic filmsOperating modeAll-in-one computer operationOverall dimensions1090mm x 900mm x 1250mmTotal weight350kg
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