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China, Chinese Lab Downward-Mounted Four-Target Magnetron Sputtering Coater for Diamond Coated Powder1 Industrial Products Supplier Manufacturer Details, price list catalog:
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Thermal Spray EquipmentPVD Coating MachineCoating Machine
HENAN RUNJING INSTRUMENT EQUIPMENT CO.,LTD
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Product Description Downward-mounted four-target magnetron sputtering coater is a special laboratory coating machine with four targets developed by our company. It is equipped with two DC power supply and two RF power supply. It can be used to prepare single or multi-layer ferroelectric thin films, conductive films, alloy films, semiconductor films, ceramic films, dielectric films, optical films, etc. FeaturesCompared with the conventional plasma sputtering, magnetron sputtering has the advantages of high energy, high speed, high deposition rate and low sample temperature rise;The magnetron target is equipped with water-cooled interlayer. The water cooler can effectively take away heat and avoid heat accumulation on the target surface, so that the magnetron coating can work stably for a long time;This model adopts the layout of under target, the sample table is on the top, and the height with the target surface can be precisely adjusted by program, and can be rotated and heated, with excellent performance. Technical parameterProduct nameDownward-mounted four-target magnetron sputtering coaterProduct modelRJ-MSH500X--DCDCRFRF-SSInputAC220V,50HzTotal power6KWUltimate vacuum degree5x10-4PaSample table parametersSize150 Dia.Height70 mm adjustableHeating≤850oCRotation speed1-20 rpmMagnetron sputtering head parametersQuantityfour-set,2-inchCooling modeWater cooled,required flow rate10L/minWater chiller10L/min circulating water coolingVacuum chamberSize500mmDia. × 550mm HMaterialStainless steelWatch window100mm Dia.Open modefront opening doorGas flow controller1channel 200sccm Ar;Vacuum pumpMolecular pump system pumping,1200L/SFilm thickness gaugeQuartz vibrating film thickness gauge ,one set,Resolution 0.10 ?Sputter power supplyDC power supply:two set,500W,for metal filmsRF power supply:two set,500W,for non-metallic filmsOperating modeself-developed professional control systemOverall dimensions1250mm X 1000mm X2000mmTotal weight500kg
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