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China, Chinese TMAXCN Brand- VTC-600-2HD-GB-LD Dual-Head 2 Magnetron Plasma Sputtering Coater DC RF Source Film Coating Machine in Glovebox1 Industrial Products Supplier Manufacturer Details, price list catalog:
China Industrial Products Supplier Manufacturer List Catalog
Metal Coating MachineryPlasma Sputtering CoaterMagnetron Sputtering Coater
Xiamen Tmax Battery Equipments Limited
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Product Description Dual-Head 2 Magnetron Plasma Sputtering Coater DC RF Source Film Coating Machine in Glovebox - VTC-600-2HD-GB-LD VTC-600-2HD-GB is a compact magnetron sputtering system with dual 2" target sources in the glovebox. The system will provide the environments of oxygen-free and humidity-free (<1 PPM ) for coating and processing air-sensitive thin film. One DC source for coating metallic film, and the other RF source for coating non-metallic material. This coating system is designed for coating both single or multiple film layers for a wide range of materials, such as alloy, ferroelectric, semiconductor, ceramic, dielectric, optical, PTFE, etc. SpecificationsGlovebox with PurificationChamber dimension: 1200 mm L x 740 mm W x 900 mm H, made of stainless steel.Hinged type front door for loading devices and sample easily Automic purging function for quickly removing O2 and H2O before recirculating purificationAutomatic regeneration function is built-in in the control panelHigh-quality purification system ensures O2 and H2O below 1 PPMTwo Antechambers for large and small samples deliverySputtering CoaterThe coater is recessed in the bottom of the glovebox with air-tight flange.Two 2" magnetron plasma sputtering guns are installed on the top of the cover, which is a hinged type door. Two sputtering power sources are integrated into one control unit and are placed outside the glovebox.One DC source: 500 W power for coating metallic materials (Pic 1)One RF source: 300 W power, 13.56 MHz frequency for coating non-conductive materials (Pic 2)Input PowerSingle-phase 220 VAC 50 / 60 Hz2500 W (including a vacuum pump and water chiller)Magnetron Sputtering Head Two 2" Magnetron Sputtering Heads with water cooling jackets and shutters are included (Pic. 1)One is connected to DC source for coating metallic materialsThe other one is connected to the RF source for non-conductive materialsTarget size requirement: 2" diameterThickness range: 0.1 - 5 mm for both metallic and non-conductive targets (including the backing plate)One Stainless Steel Target target and one Research Grade Al2O3 target are included for demo testingRecommended Sputtering Recipe and Useful TipsVacuum Chamber Vacuum chamber: 300 mm Dia. x 300 mm Height, made of stainless steelViewport: Two pieces of 100 mm Dia. glass. One fixed; one detachable for cleaning and replacementHinged type lid with pneumatic power pole allows easy target change onSample StageThe sample holder is a rotatable and heatable stage made of the ceramic heater with copper coverSample holder size: 140 mm Dia. for. 4" wafer maxRotation speed: 1 - 20 rpm adjustable for uniform coatingThe holder temperature is adjustable from RT to 500 °C max (2 hr max) with accuracy +/- 1.0 °C via a digital temperature controllerGas & Flow ControlTwo precision mass flow controllers (MFC) are installed to allow inlet of two types of gasesFlow rate: 0 - 200 mL/min & 0 - 100ml/min adjustable on the touch screen control panelAir inlet valve is installed for vacuum release5N purity Ar gas is required for operating the coating system in the glovebox.Vacuum Pump240 L/m Double Stage Rotary Vacuum Pump with Exhaust Filter is included to control chamber pressureNo turbopump is necessary for the coating system in the glovebox because the purification system can reduce the argon gas to less than 1 ppm level, which is much better than turbopumpWater ChillerOne digital temperature-controlled recirculating water chiller is included. Refrigeration range: 5~35 °CFlow rate: 16 L/minPump pressure: 14 psiOptional Precise quartz Film Thickness Monitor is optional, which can be into the chamber to monitor coating thickness with an accuracy of 0.10 ?ComplianceCE approvalNRTL Certification (UL 1450) is available upon request at extra cost Product Image Certifications
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