IPDB › China Industry › Manufacturing & Processing Machinery
China, Chinese Lab Vacuum Magnetron Sputtering Coating System1 Industrial Products Supplier Manufacturer Details, price list catalog:
China Industrial Products Supplier Manufacturer List Catalog
Thermal Spray EquipmentPowder Coating MachinePowder Coating
HENAN RUNJING INSTRUMENT EQUIPMENT CO.,LTD
Preview:
Product Description Vacuum magnetron sputtering system is used for the preparation of novel thin film materials such as nanometer single-layer and multi-layer functional film, hard film, metal film, semiconductor film and dielectric film. It can be widely used in the research and production of thin film materials in colleges and universities.Vacuum magnetron sputtering system specifications:Vacuum chamber Cylindrical front opening structure, size dia. 450×400mmVacuum system configuraitionCompound molecular pump, mechanical pump, pneumatic gate valve, imported SMC cylinder throttle valveUltimate pressure≤6.6*10-6 Pa(after baking and degassing)Vacuum recovery systemIt can reach 6.6x10-4pa in 25 minutes(start pumping after short exposure to air and filled with dry helium)Magnetron target unitThree sets of permanent magnetic target; target size dia. 60mm (one of those can be used for sputtering ferromagnetism materials); Each target rf sputtering is compatible with dc sputtering.Water cooling within the target; The sample centers of the three targets can fold upward together. The distance between target and sample is adjustable from 90 to 130mm. Each target is equipped with imported SMC rotary pneumatic baffleSingle substrate heating tableSample sizedia. 4 inchesMode of motionSubstrate rotates continuously, rotation speed 0-30 rpmHeatingHeated by imported heating wire, max heating temperature 600oC±1oCBattle formatImported SMC angle air cylinder controlGas circuit system2-circuit mass flow controllerComputer control systemFully automated control by PLC+IPC+touch screenOptional accessoriesFilm thickness gauge, air pump, cooling water circulatorFloor SpaceMain unit1000×1800mm2Electric cabinet900×600mm2
Purchasing Request
Note: Send your purchase request, and we will screen suppliers or manufacturers for you free of charge...