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China, Chinese Small Desktop Single-Target DC Magnetron Sputtering Coating Machine1 Industrial Products Supplier Manufacturer Details, price list catalog:
China Industrial Products Supplier Manufacturer List Catalog
Thermal Spray EquipmentPowder Coating MachinePowder Coating
HENAN RUNJING INSTRUMENT EQUIPMENT CO.,LTD
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Product Description The magnetron target head of the DC magnetron sputtering coater has 1 inch and 2 inches to choose from. Customers can choose the target according to the size of the substrate to be plated. The device is equipped with 150W DC power supply, which can be used for metal sputter coating. The coating machine is equipped with gas inlet port for the introduction of protective gas. If the customer needs the mixed gases, the staff can be contacted to configure the high-precision mass flow meter to meet the experimental needs. The instrument is equipped with advanced turbomolecular pump set, the ultimate vacuum is up to 1.0E-5pa, and other types of molecular pumps are also available.Small desktop single-target DC magnetron sputtering coater application:The device can be used to prepare single-layer ferroelectric thin films, conductive films, alloy films, and so on. Compared with similar equipment, the single-target magnetron sputtering coater is compact, highly integrated and small in size, and can be placed on a desktop. It is an ideal equipment for laboratory preparation of material films.Small desktop single-target DC magnetron sputtering coater technical parameters:Sample stageSizeφ138mmHeating temperatureMax 500oCTemperature accuracy±1oCRotational speed1-20rpm adjustableMagnetron Sputtering headQuantity2"×1 (1", 2" optional)Cooling modeWater coolingWater chillerCirculating water chiller with flow rate of 10L/minVacuum chamberChamber sizeφ180mm×215mmChamber materialHigh purity quartzWatch windowFully transparentOpening modeTop cover removableMass flowmeter2 channels; measuring range 100SCCM; 100SCCM (can be customized according to customer needs)Vacuum systemModelRJ-GZK103-AMolecular pumpRJ-600Backing pumpRotary vane pumpUltimate vacuum1.0E-5PaPumping interfaceKF40Exhaust interfaceKF16Vacuum measurementCompound vacuum gaugePower supplyAC;220V 50/60HzPumping rateMolecular pump: 600L/S rotary vane pump: 1.1L/S Comprehensive gas pumping performance: vacuum up to 1.0E-3Pa in 20 minutesPower configurationQuantityDC power supply×1Max output power150WOther parametersSupply voltageAC220V,50HzTotal power1.7KW (Vacuum pump 1.5KW+machine 0.2KW)Overall size500mm×350mm×400mmTotal WeightAbout 30kg
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