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China, Chinese TMAXCN Brand- GSL-1700X-EV4 2" Wafer with 4 Sources & One Temperature Controller Thermal Evaporation System Evaporating Coater Machine1 Industrial Products Supplier Manufacturer Details, price list catalog:
China Industrial Products Supplier Manufacturer List Catalog
Metal Coating MachineryThermal Evaporation SystemEvaporating Coater
Xiamen Tmax Battery Equipments Limited
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Product Description Thermal Evaporation System Evaporating Coater Machine for 2" Wafer with 4 Sources & One Temperature Controller - GSL-1700X-EV4 GSL-1700X-EV4 is a thermal evaporating system with a total of 4 evaporating sources and precision and programmable temperature control. Four evaporating crucibles could be used to deposit multiple different materials to grow multilayer films one by one in the same chamber atmosphere. The system is suitable for coating most of the film of the metallic and organic material up to 2" in size from 200 oC to 1500 oC (or 200 oC - 1700 oC with an optional B-type thermocouple).Also, this device can be modified to coat 4" dia. wafer via a single crucible evaporating. SpecificationsStructure & Features280 mm O.D. x 260 mm I.D. x 310 mm Height quartz chamber for easy cleaning and sample loading2" Dia rotatable sample holder for the uniform film coatingTungsten coil heater and alumina crucible for high-temperature coating up to 1700 oCPrecision temperature control with 30 programmable segments and +/- 1 oC accuracyA high vacuum can be achieved up to 1.0E-5 Torr via optional turbopumpThe gas flow port and valve are built-in for chamber purge and CVD possibilityInput PowerInput voltage: AC 208 - 240 V 50/60 Hz, single-phase ( 110V AC is available via 1500W transformer )Input Power: 1,200 Woutput power:: 12 V, and 30 A max current. Recommended working current <30 APower cable included without plugTemperature Control & Heaters Four Alumina Evaporating Crucibles with 3 mL each capacity. Four sources can be heated one by one to achieve a multi-layer coating A Tungsten coil heater with a thermocouple is built in at the bottom of the alumina crucible for temperature control. 4 pcs S type thermocouple (installed in each crucible) - heating from 200 oC - 1500 oC (PIC. 2)Optional B-type thermocouple (at extra cost) - heating from 1200 oC - 1700 oCOne digital temperature controller with 30 programmable segments and +/- 1 oC accuracy (PIC. 3)Recommend to limit the temperature heating / cooling rate to 0.3 oC/s (or 20 oC/min) below 1200 oC, and limit to 0.15 oC/s (or 10 oC/min) from 1200 - 1700 oCFor continuous heating above 1300 oC, please limit the operation time to less than 1 hour to preserve the service life of the bottom flange O-ringFor fast coating up to 2000 °C, the user can remove the thermocouple, alumina thermal block, and alumina crucible, load evaporation material directly into the tungsten coil heater, and use the current manual control mode (PIC. 3)Four alumina crucibles (up to 1700 oC) and two tungsten coil heaters are included. Please refer to the Optional section for ordering spare partsRotatable Sample HolderOne 2" Dia. rotatable sample stage and its shutter are installed on the top flange for coating 2" waferRotating speed: 5 rpmThe distance from the sample holder to the evaporation source is adjustable from 40 mm to 85 mmFilm Thickness Analysis System Precision Thin Film & Coating Analysis Systems - TFMS-LD is available at extra costVacuum The KF25 vacuum port is installed to connect to a vacuum pumpThe vacuum may reach <1E-5 Torr by pumping overnight with optional Turbo-pumpA vacuum pump is required for coating. Please choose from the following Product OptionsDouble Stage Rotary Vane Vacuum Pump with vapor trap to eliminate the oil mist, which can reach vacuum up to 1.0E-2 Torr for evaporating noble metallic materials, such as gold, silver, and organic materials. Anti-Corrosive Capacitance Diaphragm Gauge is includedCompact Turbomolecular Vacuum Pump System is able to provide a vacuum level up to 1.0E-5 Torr for evaporating oxygen-sensitive materials, such as Al. Mg, Li, etc. A combined Pirani and cold cathode gauge are included with the pump to measure vacuum up to 1.0E-8 TorrGas Inlet1/4 tube fitting is built-in for chamber purge or forming gas processingOne needle valve is built-in to control the gas flowing rateOptionalExtra alumina crucible and tungsten coil heater can be ordered at LITH at extra costQuartz Chamber DimensionO.D.:280mm ( 11")I.D.: 260mm ( 10.2")Length: 310mm ( 12.2") ComplianceCE CertificateNRTL is available upon requestApplication Notes To achieve the high vacuum required for the evaporation of some materials, users canCheck the chamber, O-ring, and flange for any particle, fiber, or scratch. Use lint-free tissue wetted with isopropyl alcohol (IPA) to wipe clean the surfaceUse heater tape to bake the chamber at 150 oC and pre-heat the coil heater and crucible at 500 oC while pumping with the optional turbopump for at least 2 hoursPump the chamber overnight without heating if a vacuum higher than 1.0E-5 Torr is neededDO NOT release the vacuum or stop pumping when the coater is in evaporation operation! During the heater cool down, stop pumping or release the vacuum ONLY when the temperature is decreased below 100 oC! Product Image Certifications
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