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China, Chinese Ceramic Wafer Heaters1 Industrial Products Supplier Manufacturer Details, price list catalog:
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Heater Heat ExchangerVapor ChamberAln Aluminum NitrideHeater Wafter Heater PVD CVD
Sinotec Cerameta (Ningbo) Advanced Materials Technology Co., LTD
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Product DescriptionAlN wafer heaterThese heaters are designed to support and heat silicon wafers. They are made of aluminum nitride (AlN), which has outstanding thermal conductivity. They are co-sintered with resistance heating elements to provide excellent thermal uniformity, and reduce metal contamination.SpecificationExcellent thermal uniformity and wide operating temperature range These heaters are made of high thermal conductivity material (AlN) and provide excellent thermal uniformity over a wide temperature range (up to 800 deg.C) Compact The resistive heating elements and bulk RF electrodes are co-sintered in AlN ceramics, and the ceramic shaft is directly bonded to the heater plate. High corrosion resistanceThese heaters have superior corrosion resistance against halogen gas and oxidizing environments.Wafer chucking function RF electrodes are co-sintered in the ceramic plate. These electrodes can be used as electrostatic chuck electrodes for wafer chucking.HP heaterHTCC heaterAlN ShaftTechnical Specifications(Custom configurations available upon request.)ModelAlN heaterESCFine ceramicsMaterialsALNAlN\Al2O3Al2O3\Y2O3\AlN\SiCOEMOEM\ODM\OPMOEM\ODM\OPMOEMKey parametersTemperature range/uniformity(℃)working voltages(kV)purity(%)Commen data300-650/10(±1%)1-1091%-99.99%Max size (inch)141225Flatness (mm)up to 0.001up to 0.001up to 0.001After Sales ServiceStandard Warranty: 12 months or 2,000 operating hours (whichever comes first).Extended Warranty: Optional coverage up to 36 months.Global Support: 24/7 technical assistance and spare parts supply.Training: On-site or remote operation/maintenance training.Company ProfileServing industriesPhotovoltaic IndustrySemiconductor industryNew Energy IndustryPetrochemical industryAerospace industryMedical equipment industrWhy Choose Us?Products AbilityStrong R&D strengthProfessor/Doctorate in Materials ScienceSenior material fabrication specialistPrecision Parts Processing EngineerComponent design/manufacturing expertsAnd with the domestic related universities / research institutesEstablished a close relationshipRaw material synthesis and processingPowder ProductionPrecision moulding/sinteringPrecision and ultra-high precision machiningFunctionalisation of special ceramicsCeramic-based Electronic Components Full Process Technology and ManufacturingFAQQ: What's the lead time for orders?A: Standard models ship in 60-90 days; customized units require 90–150 days.Q: Do you provide after-sales service overseas?A: Yes, we have partnered service centers in key regions.Q: Can I request a customized bucket size?A: Absolutely! We offer tailored attachments.Q: What documents do you provide for export?A: Full export package (Commercial Invoice, Packing List, Bill of Lading, COC, etc.).Q: How do I place an order?A: Contact us via email/phone for a quote, then confirm with a PO.
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