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Termway (Beijing) Precision Technology Co., Ltd.
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Product Description Chinese Economical TORCH Offline Vacuum plasma cleaning machine VPC42Equipment name: Offline vacuum plasma cleaning machineModle No.: VPC42Manufacturer : Beijing Torch SMT Incorporated CompanyI. Equipment name, type number, origin and delivery date1.1 Equipment name: Vacuum plasma cleaning machine1.2 Model No.: VPC421.3 Origin (country, manufacturer): Beijing Torch SMT Incorporated Company1.4 Delivery date: 4-8 weeks after the contract comes into effect1.5 Mainly used for plasma surface treatment process in semiconductor enclosure fields such as silicon wafer, glass substrate, ceramic substrate, IC carrier plate, copper lead frame, large-size single-sided substrate power board, IGBT module, MEMS sensor with fixture, microwave device, filter, RF device, etc.II. Main technical performance parameters:2.1 volume of vacuum chamber: 42L2.2 vacuum degree:The maximum vacuum degree of VPC42 vacuum plasma cleaner is less than 2 Pa (mechanical dry pump 40L/Minute)2.3 Effective cleaning area:Single cleaning area: 350 *350mm15 layers: 15mm interval: 40KHZ 2KW intermediate frequency (surface treatment)5 layers: 50mm interval, 13.56HZ 300W radio frequency (volume processing, with water cooling)2.4 Height of vacuum chamber:Chamber height: 350mm (effective size)2.5 Cleaning temperature:Low temperature cleaning (below room temperature).2.6 Cleaning frequency: 30-120s2.7 Cleaning effect: the dyne value can reach 70. The water drop angle is 15 degrees, and it can be optimally controlled within 10 degrees(Workshop with air cleanliness at Class 100 dust-free can be cleaned within 4 hours)2.8 Gas can be used:Argon, nitrogen, oxygen, nitrogen hydrogen mixture, hydrogen and Carbon tetrafluoride, etc.2.9 VPC42 vacuum plasma cleaning machine is equipped with software control system:The software control system is easy to operate, it enables control equipment connecting, and various cleaning process curves can be set, and curves can be set, modify, store and select for use according to different processes; The software has its own analysis function, which can analyze the process curve. The software control system will automatically record the cleaning process data, temperature curve, time and alarm related data in real time to ensure the traceability of product cleaning process.2.10 The equipment does not need to be calibrated thus no more calibration fees will occur.2.11 Operating power consumption: 2.5KW, excluding the power consumption of chiller(intermediate frequency)1.5KW, excluding the power consumption of chiller (Radio frequency)2.12 The function of over temperature alarm and recording. (standard configuration)VPC42 vacuum plasma cleaning machine is functioned with workpiece surface over temperature protection,alarming, temperature safety protection and recording of the whole machine during cleaning process.2.13 Nitrogen, argon and other flow management and analysis systems (Software + hardware). (Optional)VPC42 vacuum plasma cleaning machine is functioned by real-time management and analysis of process gases such as nitrogen and argon consumed by the whole machine, and can record and analyze the gas consumption, daily consumption, weekly consumption and different time period consumption in real time.2.14 Process gas pressure alarm function and analysis system (Software + hardware). (Optional)VPC42 vacuum plasma cleaning machine is functioned by undervoltage alarm, recording and analysis of process gas source in the production process of the whole machine, which is very useful for product quality traceability.2.15 Energy management and analysis system (Software + hardware). (Optional)VPC42 vacuum plasma cleaning machine is functioned by real-time management and analysis of energy consumption, and can analyze the recording of real-time power consumption, daily power consumption, weekly power consumption, time period power consumption, etc.2.16 With output statistical management and analysis system (software + hardware). (Optional)The VPC42 vacuum plasma cleaning machine has the function of real-time management and analysis of the output of the vacuum processing products of the whole machine. It can log and record and analyze the real-time shift output, daily output, weekly output, and monthly output for product quality traceability and analysis.2.17 MES data interface subsystem (Software + hardware). (optional)VPC42 vacuum plasma cleaning machine is also functioned by MES data interface of the whole machine, and MES system can be selected and configured to complete various data acquisition and analysis of intelligent equipment.2.18 Overall dimensions:850*960*1680mm (excluding alarm light)2.19 Internal structure: see the right figureIII. Basic composition and configuration:NoDescription configurationqty1vacuum plasma cleaning machineMain machine1set2Plasma power systemStandard configuration1set3Temperature measurement systemStandard configuration(2 groups of temperature measuring thermocouple, 1 for use, 1 for backup)1set4Vacuum systemStandard configuration1set5Mechanical pumpStandard configuration1set6Water cooling systemStandard configuration(Industrial cooling machine is excluded)1set7Industrial cooling machineOptional1set8Process gas systemStandard configuration(Process gas pipeline and interface)1set9Nitrogen atmosphere protection systemStandard configuration(exclude nitrogen souce supplying)1set10vacuum plasma cleaning machine software systemStandard configuration(control software)1set11Industrial computerStandard configuration1set12PlasmaStandard configuration1piece13Temperature measurement sensor (spare parts)Standard configuration214Cooling pipeline (spare parts)Standard configuration215Process gas volume management and analysis systemOptional1set16Process gas pressure alarm and analysis systemOptional1set17Power management and analysis systemOptional1set18Oxygen content management and analysis systemOptional1set19MES data interface systemOptional IV. VPC42 Technical parameterBrandManufacturerBeijing Torch SMT Incorporated CompanyRemarksBrief introductionOriginBeijing Key components Temperature sensorUS OMEGA Vacuum pumpKYKY/BSC Globe valveJapan brand Corossion resistence valveJapan brand Low voltage electric systemSCHNEIDER Botton switchTaiwan JICTEN/SCHNEIDER Magnetic proximity sensorOmron HeaterTORCH Key technical indexTemperatureLow temperature cleaning, temperature is maintained under room temperature Min. Vacuum degree5Pa Oxygen content<1ppm Production efficiency20-120S Key process indexQuality traceability1. Process gas pressure alarm record. 2. Oxygen content alarm record. 3. Temperature over temperature alarm record. 4. Alarm record of non-compliance of vacuum value Intelligence and informatization1.Intelligent function. If one of the above 4 indicators fails to meet the standard or gives an alarm, an overall alarm and prompt to stop production will be displayed to ensure the production quality. 2. Energy management system, power consumption and nitrogen consumption are counted and displayed in real time in the energy management system. 3. All above information can be seamlessly connected to MES system through data interface to facilitate the decision-making and management of management team. FacilitiesPower380VAC,20A GasCompressed air(CDA)0.5Mpa Nitrogen0.5Mpa VacuumEquipped with vacuum dry pump Note:The control software for the vacuum plasma cleaning machine of Beijing Torch SMT Incorporated Company is independently developed by Beijing Torch SMT Incorporated Company and Beijing Torch SMT Incorporated Company pocesses the right of software registration without third-party certification.The vacuum plasma cleaning machine from Beijing Torch SMT Incorporated Company has already obtained a number of national patents. Please do not risk copying!!
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