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China, Chinese Lithography Machine Soda Mask Template1 Industrial Products Supplier Manufacturer Details, price list catalog:
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Optical Lens InstrumentOptical LensMaskMask Template
Shanghai Anttrans Technology Co., Ltd
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Product Description Product Description Quartz MaskQuartz Mask uses high-purity quartz glass as its substrate. Quartz glass boasts high transmittance, high flatness, low coefficient of thermal expansion, and other advantages, although its cost is relatively high. It is typically used in high-precision mask products. Quartz masks are mainly utilized in the semiconductor application field, including analog ICs, various discrete devices, MEMS, and flat panel displays.ITEMRankSYABCDEFGHIDesign Rule(μm)>52-51-210.80.50.350.250.180.150.13CD Tolerance(±μm)±0.5±0.3±0.2±0.15±0.1±0.075±0.05±0.04±0.03±0.025±0.02CD Range(μm)≤0.5≤0.3≤0.2≤0.15≤0.1≤0.07≤0.05≤0.04≤0.035≤0.03≤0.025CD mean to target(μm)±0.5±0.3±0.2±0.15±0.1±0.07±0.04±0.03≤0.03±0.02±0.02Registration & OverlayBased on the 1st layer(μm)±0.5±0.3±0.2±0.15±0.12±0.10±0.07±0.05≤0.04±0.03±0.02DefectDefect size(μm)<4<2<1.0<1.0<0.75<0.5<0.4<0.3<0.3<0.25<0.20Soda MaskSoda Mask employs soda-lime glass as its substrate material. Soda-lime glass has a relatively higher coefficient of thermal expansion than quartz glass, and its flatness and wear resistance are relatively inferior to quartz glass, but its cost is lower. It is usually applied in low to medium-precision masks. Soda masks are mainly used in fields with lower precision requirements, including low to medium-end semiconductor manufacturing, semiconductor packaging, optical devices, low to medium-end display panels, touchscreens, and circuit board manufacturingITEMRankSYABCDEFGHIDesign Rule(μm)>52-51-210.80.50.350.250.180.150.13CD Tolerance(±μm)±0.5±0.3±0.2±0.15±0.1±0.075±0.05±0.04±0.03±0.025±0.02CD Range(μm)≤0.5≤0.3≤0.2≤0.15≤0.1≤0.07≤0.05≤0.04≤0.035≤0.03≤0.025CD mean to target(μm)±0.5±0.3±0.2±0.15±0.1±0.07±0.04±0.03≤0.03±0.02±0.02Registration & OverlayBased on the 1st layer(μm)±0.5±0.3±0.2±0.15±0.12±0.10±0.07±0.05≤0.04±0.03±0.02DefectDefect size(μm)<4<2<1.0<1.0<0.75<0.5<0.4<0.3<0.3<0.25<0.20Detailed Photos
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