IPDB › China Industry › Instruments & Meters
China, Chinese Advanced Roll-to-Roll Pecvd System for Flexible Electronics and Thin Film Coatings1 Industrial Products Supplier Manufacturer Details, price list catalog:
China Industrial Products Supplier Manufacturer List Catalog
Laboratory InstrumentsLaboratory Heating EquipmentRoll to Roll PecvdPecvd Furnace
Luoyang Kunsheng Instrument Equipment Co.,Ltd
Preview:
Product Description Product Description:The KS-PECVD-1200-RR developed by Luoyang Kunsheng Instrument Equipment Co., Ltd is a highly integrated roll-to-roll PECVD system, purpose-built for high-quality thin film fabrication on flexible substrates. With a focus on precision, reliability, and ease of operation, this system is engineered to meet the demanding needs of advanced research and small-batch production.This equipment combines plasma-enhanced chemical vapor deposition technology with an efficient roll-to-roll substrate handling mechanism. The integration of multiple components-such as plasma RF generation, vacuum chambers, precise tension control, and multi-channel gas delivery-enables seamless operation and consistent coating performance over extended substrate lengths. Its modular design ensures flexibility to adapt to different process requirements and material types.At the heart of the system is a robust and stable thermal processing unit, capable of delivering highly uniform heating. This ensures excellent film adhesion, controlled reaction kinetics, and repeatable process outcomes. The roll-to-roll transport system is designed to maintain even substrate movement with minimal mechanical stress, which is particularly important when working with thin metal foils or polymer-based films.The KS-PECVD-1200-RR features a fully automated control interface, including a touchscreen panel for intuitive operation of temperature, gas flow, and plasma power. Additionally, PC software is available for remote monitoring, data logging, and multi-step process programming. This allows researchers and engineers to develop complex coating processes with high precision and reproducibility.The vacuum system is optimized for clean and stable operation, ensuring a contaminant-free environment during deposition. Special attention is given to corrosion resistance and long-term durability, even in reactive gas environments. For laboratories with specific requirements, various upgrades and options are available, including larger substrate compatibility and enhanced process monitoring.Thanks to its compact footprint and user-friendly architecture, the KS-PECVD-1200-RR fits well into any research lab or pilot-scale facility focused on flexible electronics, solar energy materials, barrier coatings, or nano-structured surface development. Whether your goal is experimental material science or scalable thin-film production, this system provides the technological foundation for success.Technical Parameters:Product ModelKS-PECVD-1200-RRHigh purity quartz tube 80mm OD x 72mm ID x 1400 mm LengthRF frequency 13.56 MHz ±0.005% stabilityMatching AutomaticRF Output Port 50 Ω, N-type, femaleNoise < 50 dBCooling Air coolingOutput Power 5 - 300W adjustable with ±1% stabilityInput power 208 - 240V AC, 50/60Hz, single phaseMax. working temperature 1200°C for < 60 minutesContinuous heating temperature 1100°C MaxTemperature control 30 programmable segments with ±1°C accuracyOptional controller Eurotherm 3000 with ±0.1°C accuracyControl panel 7" touch screen for temperature, gas flow, plasma powerOptional software PC control software availableGas channels 3 channels with independent controlController 1 range 0~100 SCCM (Ar)Controller 2 range 1~199 SCCM (H2)Controller 3 range 1~499 SCCM (Methane)Vacuum pump 7.8 CFM Rotary Vane with 10-2 Torr ultimate pressureVacuum pipe KFD25 adapter with stainless steel pipe and ball valveVacuum pressure gauge Digital display integrated with systemOptional pressure system Oil-less pump and PID control systemAnti-corrosive gauge range 3.8×10-5 to 1125 TorrSystem dimensions 2400 L x 600 W x 1250 H mm
Purchasing Request
Note: Send your purchase request, and we will screen suppliers or manufacturers for you free of charge...