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China, Chinese Two Zones Css Furnace for Rapid Thermal Processing Upto 5" Dia Wafer1 Industrial Products Supplier Manufacturer Details, price list catalog:
China Industrial Products Supplier Manufacturer List Catalog
Laboratory InstrumentsOther Lab InstrumentsClose Spaced Sublimation Film CoatingCss Furnace
Zhengzhou CY Scientific Instrument Co., Ltd.
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Product Description Two Zones CSS Furnace for Rapid Thermal Processing upto 5" Dia Wafer at Max.800°C - OTF-1200X-RTP-II-5 IntroductionOTF-1200X-RTP-II is a two heating zone rapid thermal processing furnace with 11" I.D.quartz tube. It is designed for PVD or CSS (Close Spaced Sublimation) film coating up to 3" diameter or 2"x2" square. The furnace is heated by two group of halogen heaters (Top and Bottom) separately with max. 20oC/s heating rate. Two 30 segment precision temperature controllers are built in with +/-1oC accuracy. RS485 port and control software are included to allow for the operation of furnace and temperature profile logging via PC. It is excellent tool to research new generation thin film for solar cell, such as CdTe, Sufide and Perovskite solar cell Specification:Furnace structure Vacuum Chamber Furnace, two temperature controllers, two channel gas flow meters are integrated into a mobile aluminum alloy frameThe chamber is made of high purity fused quartz tubeQuartz tube size: 11" OD/10.8" ID x 9" HThe vacuum flanges are made of Stainless Steel 316Vacuum FlangesTop Flange with one KFD-25 vacuum port and one gas outlet (1/4" pipe required) can slide up or down manually to load and unload substrate and evaporated material easilyBottom flange has one KFD-25 vacuum port with one gas inlet (1/4" pipe required) with needle valvesFlange is sealed by double silicone o-rings and can achieve max. vacuum pressure of 10E-2 Torr by a quality mechanical pump and 10E-5 Torr by molecular pump One digital vacuum gauge is installed on the top flange. Precision annti-corrosion digital vacuum gauge is optional at extra cost ( Pic. 2)Gas Flow Meters Gas mixer integrated with two float-meters with adjustable measurement ranges of:16 -160 mL/m 500 - 5000 mL/m (for purging purpose) Heater andSample Holder Two independently controlled heaters with manually adjustable gap from 2 - 30 mm 20 pcs Halogen lamps are used as heating element for rapid thermal processing.Heaters are is made of stainless steel with water cold jacket to reduce heat radiation and allow for fast cooling.5" dia. circular wafer holder is built into top heater for holding substrate.One set of high thermal-conductive AlN plates (5" Dia. x 0.5mm Thick) are included (place on the back of substrate to make it heat uniformly).A 16L/min recirculating water chiller is included for saving water source Temperature ControllerTwo precision digital temperature controllers with 30 segments programmable offer independent controlling of top and bottom heatersEach controller has PID auto tune function to protect heaters from overshooting and alarm function to avoid overheating and thermal couple brokenPC communication interface & software is installed for (click picture below for details) recording temperature profile shown as belowWorking TemperatureMax. temperature for each heaters: <= 800oCMax. temperature difference between two heaters: <= 300oC depends on spacing between two heaters:Spacing 30mm Max. temp difference: 315oC @ heating bottom onlyHeating &Cooling RateHeating: > 8oC/s ( heating single heater only )Cooling: > 10oC/s (600 - 100oC) Max.Thermal CoupleTwo K-type thermal couples are installed on top and bottom heaters separatelyWorking Voltage208 - 240VAC, single phase, 20A air breakerPower Requirement2200W total ( 1100W for each heater )WarrantyOne year limited with life time supportDimensions1085mm L x 680mm W x 1710mm HFounded in 2005, Zhengzhou CY Scientific Instrument Co., Ltd. is a company specializing in the development and production of laboratory technology research equipment. The products are mixed, pressed, burned, cut, ground, polished, coated, analytical equipment and related consumables. Products include laboratory sintering equipment, coating equipment and so on. At present, it has been exported to 25 countries and regions such as the United States, Europe, and Southeast Asia, and has been well received by various scientific research units.We have a mature technology research and development team, the number of technicians is 33, the company has 150 people, more than 500 square meters of office space, the factory covers an area of about 1,500 square meters located in Zhengzhou High-tech Zone Electronic Industrial Park. The products are mainly located in the research market, serving scientific research in the labs of universities and colleges, and can also customize products according to your needs.Q. Are you a manufacturer or a trading company?A. We are professional laboratory instrument manufacturers, have their own design team and factory, have mature technical experience, and can guarantee the quality of products and the optimal price.Q. How is your company's product after-sales service system?A. The product warranty period is 12 months, we can provide lifetime maintenance. We have professional pre-sales and after-sales departments that can respond to you within 24 hours to resolve any technical issues.Q. How long is your delivery time? If I want to customize the instrument, how long does it take?A.1. If the goods are in stock, it is 5-10 days. 2. We can provide customized services for our customers. It usually takes 30-60 days depending on the specifications of the custom instrument.Q. Our country's power supply and plug are different. How do you solve it?A. We can supply a transformer and plug according to your local requirements according to the power plug of different countries.Q. How to pay?A.T / T, L / C, D / P, etc., it is recommended to use Trade Guarantee.Q. How is the package of goods? Delivery methods?A.1. Standard export fumigation sign wooden box packaging 2. Express, air, sea shipping according to customer requirements, find the most suitable way.
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