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Cleaning MachineCleaning Machine PartsPlasma Cleaning MachinePlasma Cleaner
Guangzhou Minder-Hightech co.,Ltd
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Product Description SPMV-100HT Vacuum microwave plasma cleaning machineMicrowave plasma cleaning machine, SPMV-100H is a low-pressure microwave plasma cleaning system, which is used for surface pretreatment before SMT, wire bonding, packaging and other processes. The freely moving electrons generate Plasma and enter the magazine where the cavity is located for process cleaning. A large amount of sustained plasma can be generated by applying microwaves at a frequency of 2.45 GHz to a window in the wall of the vacuum cavity. The cavity is suitable for different size cartridges.SPMV-100H can provide fast non-destructive plasma cleaning effect. The plasma cleaning effect of the system is achieved by the generation of activated free radicals through the cartridge.Featuresu The product placement fixture is flexible and can adapt to irregular productsu Electrodeless microwave design can meet the processing needs of soft products.u No UV radiationu Low temperature plasma to avoid thermal damage to the productu Electrically neutral plasma, no electrical damage to productsu Equipped with magnetic fluid rotating frame to increase the uniformity of Plasma treatmentu Efficient and uniform microwave plasma output to ensure etching efficiencyIndustry applicationu PCB/FPC industry: hole drilling and surface cleaning, coverlay surface roughening and cleaningu Semiconductor industry: semiconductor packaging, camera modules, LED packaging, BGA packaging, Wire Bond pretreatmentu Ceramic: packaging, pre-dispensing treatmentu Surface roughening etching: PI surface roughening, PPS etching, semiconductor silicon wafer PN junction removal, ITO film etchingu Plastic materials: surface activation, ABS surface activation, and other plastic materials cleaning activationu Surface cleaning before ITO coatingTechnical Parameter Equipment SpecificationPower SystemsPower TypeMicrowave powerPower0~1250WFrequency2.45GHzVacuum SystemTwo-stage rotary vane pump (oil pump)60m3/h(Optional dry pump)Vacuum lineAll stainless steel pipes, and high-strength vacuum bellowsMaterialAluminum alloy (customized stainless steel cavity)Thickness25mmTightnessgrade welded sealInner Chamber size450×450×450mm(W×H×D)Workspace6 magazine sectionsECRSlotted Magazine and provides ECR enhanced treatmentTray rotationMagnetic fluid control tray rotationGas systemFlow range0~300SCCMProcess gas circuitStandard two-wayCF4 gas optionalControl SystemSystem controlPLCInteractive mode7 inch touch screenOther specificationMachine size1300×2100×1200mm(W×H×D)Weight250KGColorSilver greyFactory specifications requireAC Power SpecificationsPower supply:AC380V,50/60Hz,5-wire,50AFactory exhaustFlow :2.0 m3/minFactory working gas requirementsFlow:1~10 L/minPressure :3~7 kg/cm2Pipe diameter :6×4 mmMaterial :PU tubepurity :99.99% aboveFactory compressed air requirementsFlow:1~10 L/minPressure :3~7 kg/cm2Pipe diameter :8×5 mmMaterial :PU tubedew point :-40oCbelowParticle>0.3μm:10Pcs/ft3General SpecificationsDanger signsHigh Voltage Hazard SignUse environmentTemperature :15~30oCHumidity :30~70%Other considerationsNo flammable gas, corrosive gas, explosive or reactive dustCylinders need to be fixedConfiguration listNo.NameDescriptionUnitQty1HostDimension:1300×2100×1200mm(W×H×D)Set12Vacuum chamberVacuum chamberInner size 450×450×450mm(W×H×D)Set13Excitation powerMicrowave plasmaSet1Frequency:2.45GHzPower 0~1250W4PLCSiemens, Germany,S7-200Pcs15Touch screenMCGS, seven-inch screenPcs16FlowmeterWAWICKPcs27Vacuum pump settwo-stage rotary vane pump (oil pump):60m3/hSet18Vacuum gaugeINFICONPcs19ManualOperation Manual of Vacuum Microwave Plasma Cleaner SPMV-100HSet1MaintenanceItemInspection contentsLifeInspection frequencyOil pumpFilter elementUsage time 2000H15-dayPump oilUsage time 2000H15-dayDetailQuality assurance and after-sales service1,The warranty period is 1 year. During the warranty period, damaged parts shall be replaced free of charge under normal use2,If the operation is within the safety range that the equipment cannot meet, resulting in the damage of relevant parts, our company will not be liable for compensation3,In case of equipment damage caused by force majeure disasters such as earthquake, fire, typhoon and tsunami, our company is not responsible for compensation4,Our company will not be liable for any direct or indirect damage to the equipment caused by non use of original parts5,If the equipment is damaged or defective due to improper design, our company will replace the defective or damaged parts free of charge6,After the warranty period, your company shall be responsible for the consumables and service costs required for replacing parts.
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