IPDB › China Industry › Metallurgy, Mineral & Energy
China, Chinese Glovebox 4-Target Multi-Mode Metal PVD Sputtering Deposition System For R&D1 Industrial Products Supplier Manufacturer Details, price list catalog:
China Industrial Products Supplier Manufacturer List Catalog
Metallic Processing MachineryMetal Coating MachineryMetal Sputtering DepositioMetal PVD
Xiamen Tmax Battery Equipments Limited
Preview:
Product Description Glovebox 4-Target Multi-Mode Metal PVD Sputtering Deposition System For R&DModel: TMAX-PC-JS05-Target Multi-Mode Sputtering (DC + RF + Strong Magnetic Field)Technical ParametersCategorySpecificationChamber StructureHorizontal design, electric lift-off top cover, stainless steel/vacuum materialsBase Vacuum≤5×10-5 PaWorking Vacuum≤5×10-4 Pa (achieved in 100 min after pump-down)Leak Rate≤5×10-7 Pa·L/sPressure Rise Rate≤10 Pa (after 12 h shutdown)Pumping SystemDomestic molecular pump + mechanical pumpTarget Configuration4 × 6-inch targets (3 standard-field, 1 strong-field); DC/RF, max 5,000 WTarget-Substrate Distance40-120 mm (adjustable)Substrate HeatingMax 400°C, programmable rate/dwell timeFilm Thickness Uniformity≤5% (2-inch area; Cu/Al: 4-5 μm; Ni/PTFE: 1-2 μm)Adhesion StandardPasses 3× tape peel tests (glass/Si/ceramic substrates)Pre-CleaningReverse sputtering capabilityIon SourceAnode-layer ion source (cleaning + assisted deposition)Gas Control2 MKS mass flow controllers (reactive/Ar gases), mixing/pressure adjustmentBaking Temperature150°C (infrared heating)Safety ProtectionsWater/power failure interlock, anti-misoperation designAutomationPC-controlled (target switching, rotation, temperature, shutters) Key Features & Suitability Analysis1. Precision Deposition for Advanced Films· Nanoscale control: Achieves ≤5% thickness uniformity for functional films (e.g., semiconductors, hard coatings).· Multi-material flexibility: Simultaneously supports metals (Cu/Al), dielectrics (PTFE), and compounds via 4 targets.2. Enhanced Process Stability· Ion-assisted deposition improves film adhesion and density.· Pre-sputtering cleaning ensures contamination-free substrates.3. User-Friendly Operation· Automated PC control simplifies complex processes (e.g., multilayer deposition).· Horizontal chamber design enables quick sample loading.4. Industrial & Research Versatility· R&D labs: Ideal for prototyping optical, electronic, or wear-resistant coatings.· Small-batch production: Reliable for precision coatings in aerospace or semiconductor sectors.5. Safety & Maintenance· Liner plates protect chamber walls, reducing maintenance downtime.· Interlocks prevent damage from operational errors.Summary: The CK800 excels in high-repeatability, multi-material deposition, and automation, catering to both cutting-edge research and specialized industrial coating needs. Why Choose?1. 4-Target Multi-Mode Sputtering (DC + RF + Strong Magnetic Field)· Unique Feature: Only system in its class offering 3 standard-field targets + 1 strong-field target in a compact design.· Competitor Comparison: Most systems provide only DC or RF targets separately, limiting material compatibility.· Client Benefit: Enables simultaneous deposition of metals, insulators, and alloys (e.g., Cu+Al2O3+Ni) without breaking vacuum. 2. Ultra-High Vacuum with Rapid Recovery (<100 min to 5×10-4 Pa)· Unique Feature: Patented bypass pumping + dry nitrogen venting reduces pump-down time by 40% vs. industry average.· Competitor Comparison: Comparable systems often require 3+ hours to reach working vacuum after venting.· Client Benefit: Dramatically improves throughput for batch processing (e.g., 8-10 runs/day vs. 4-5 with competitors). 3. Integrated Ion-Assisted Deposition (IAD) for Superior Film Quality· Unique Feature: Built-in anode-layer ion source for in-situ cleaning + energy-enhanced deposition.· Competitor Comparison: Most systems require external ion guns (added cost/complexity).· Client Benefit: Achieves >2x better adhesion (passes 10+ tape tests vs. industry-standard 3) and denser films for optical/barrier coatings. Certifications
Purchasing Request
Note: Send your purchase request, and we will screen suppliers or manufacturers for you free of charge...