IPDB › China Industry › Metallurgy, Mineral & Energy
China, Chinese Dual Chamber Evaporation Coating System for Multi-Layer Thin Film Deposition1 Industrial Products Supplier Manufacturer Details, price list catalog:
China Industrial Products Supplier Manufacturer List Catalog
Metallic Processing MachineryMetal Coating MachineryEvaporation Coating SystemEvaporation Coating Machine
Jinan ACME Power Supply Co., Ltd.
Preview:
Product Description Product DescriptionThis equipment is developed by our company for vacuum evaporation deposition of optical thin films, organic thin films and metal thin films. It is particularly suitable for high-tech enterprises, scientific research institutions and universities for film layer research and film system development.Main technical parameters:1. Vacuum chamber: 300*300*H450mm; 2. Maximum plateable workpiece diameter: φ100mm, equipped with a pull-out sample table, the sample can be rotated; equipped with a copper substrate sample table;3. Ultimate vacuum degree: better than 6*10-5Pa; 4. Pumping time: atmospheric pressure ~ 6*10-4Pa less than 30min; 5. Evaporation: resistive evaporation electrode (4 pairs) Power: 2KW; equipped with 2 sets of digital display evaporation power supplies, one of which can be switched to 2 sets of electrodes.6. Opening method: front door structure, easy to change wires and load materials; 7. Vacuum system: mechanical pump + molecular pump;8. Film thickness meter: quartz crystal film thickness meter, equipped with a set of water-cooled probes;9. Water cooling system: The system is equipped with a cooling water circulation system. ItemSpecifications and DescriptionVacuum ChamberEvaporation vacuum chamber300*300*H450mm, the size can be adjusted according to the design requirements, side doorMolecular pump Molecular pump 620L/SMechanical pump BSV30 rotary vane pump, also acts as pre-pump and backing pumpBaffle valve DN40 solenoid flapper valve, pre-pumping pipeline on and off Stop valve 6mm double ferrule interface electric stop valveLighting and baking device Optional Various types of flanges and observation windows DN16, 35, 63, 100, 150 Stainless steel pipelines, pipe joints Various specifications of precision stainless steel pipes, bellows, pipe joints Vacuum measurement and air intakeDigital composite vacuum gauge 5227 composite vacuum gauge or imported full-range gauge optional Metal bare gauge ZJ52T, ZJ27 metal interfacePipes and connectors Mixed gas chamber Stop valve 6mm double ferrule interface electric stop valve Intake and other control interfaces Manual or electric controlSample rackRotating substrate rack Substrate rotation, substrate rack lifting Lifting device Lifting manual adjustment or electric liftingSubstrate heating device≤600oC Heating device optional Temperature control power supply Japan Shimaden temperature control, PID temperature control Evaporation systemEvaporation systemWater-cooled evaporation source, optional 3~4 groupsEvaporation power supply8-200A, 2~4 setsEquipment rack Integrated layout Water and gas system Including cooling water machine Control system Standard manual, optional touch screen automatic controlMain technical parameters:1. Vacuum chamber: φ500*H650mm;2. Maximum plateable workpiece diameter: φ400mm umbrella-shaped sample holder;3. Ultimate vacuum degree: better than 6*10-5Pa;4. Pumping time: atmospheric pressure~6*10-4Pa less than 30min;5. Evaporation: resistive evaporation electrode (6~8 pairs) Power: 2KW; equipped with 3~4 sets of digital display evaporation power supplies, one of which can be switched to 2 sets of electrodes;6. Opening method: front door structure, easy to change wire and load;7. Vacuum system: mechanical pump + molecular pump;8. Film thickness meter: quartz crystal film thickness meter, equipped with a set of water-cooled probes;9. Water cooling system: the system is equipped with a cooling water circulation system.The system is a single vacuum chamber configuration, with a set of 4~6-station electron guns and 2 sets of metal evaporation sources built in. The vacuum chamber size is 500×500×650mm (adjusted appropriately according to design needs). The cavity is made of 304 stainless steel, the inner surface is polished, and the outer surface is shot peened. In order to facilitate experimental operation, a side-opening door is adopted, the exhaust port is rear-placed, and the door is equipped with a glass observation window (including anti-pollution baffle). The coating process is completed in this vacuum chamber. At the same time, considering the needs of system expansion, the required flange interface is reserved.The electron gun and evaporation electrode are installed on the vacuum bottom plate. The electron gun uses an 8KW power, six-station water-cooled crucible E-type electron gun. Equipped with 2 sets of metal evaporation sources, one set of power supply switching.The substrate holder adopts a welded bellows + magnetic fluid structure, the sample holder adopts an arched structure, the maximum diameter is 100mm, and the steam distance is 450-550 mm adjustable, which is obtained by deforming the welded bellows. The substrate rotation speed is 3-60 rpm, which is controllable and adjustable (stepper motor control).In addition, high-pressure bombardment device or ion source assisted deposition system can be selected as needed.The system is equipped with a film thickness measuring instrument as standard, and a film thickness controller can be optionally equipped to achieve automatic control of the coating process. Company ProfileOur company can provide customers with diversified vacuum coating system design solutions, which can flexibly achieve co-sputtering deposition, multi-layer film deposition, insulating films, and compound film preparation, meeting the requirements of film preparation in various fields. The developed multifunctional evaporation coating machine is widely used in the research and development of OLED and OPV products. On the basis of standard configuration, our company can customize coating machines for specific purposes, portable coating instruments, testing instruments, and non-standard vacuum products according to customer needs. CertificationsPackaging & ShippingCustomer satisfaction,our responsibility!"Unity,rigor,initiative and innovation"is the essence of the corporate culture of ACME.It is deeply rooted in the business philosophy of"Customer Satisfaction,Our Responsibility!",constanty surpasing customer expectations and win the trust of many reputable companies.ACME provides professional,fast anddedicated services for every customer.Pre-sales,sales and after-sales servicepersonnel servellprovinces, cities and regions in the country,and establish offices in customer concentration areas.ACME power,service is at your side.In orderto create a global gold power supplier,ACME takes "Technology Priority,Reliable Quality and Customer Satsfaction"asthe ultimate goal,adhere to theservice tenet of "Customer Satisfaction",carefully shape the brand image of ACME Energy Service,and provide customers with the fastest and most efficient after-sales service.At the same time,provide comprehensive training for the customer,actively organizetechnical exchanges,achieve common growth,andachievewin-win goals.1)Quick response:Customer Service Engineering provides customers with 7X24 hours of product technical support and solution consulting. The field service response:City:Arrive within 2 hours (with service outlet city); Within the province:arrive within 24 hours;Outside the province:arrived in 48 hours;In addition,ACME has after-sales special service,providing emergency response services,able to arrive at the scene in the fastest time.2)24/7 service mechanism:365 days:everyday service,fully in place; 24-hour consultation service,all the time;24 hours of technical support,useassured;24-hour on-site service to ensure peace of mind;3)Service team:Pre-sales support team:professional pre-sales technical consultation provided by professional and technical personnel; Technical support team:thoughtful after-sales service provided by professional after-sales service engineers;Customer complaint handling clerk:acceptall kinds of complaints from customers,deal with themquickly,and provide timely feedback.4)Humanized service planRemote guidance:provide technical support such as remote telephone and mail; On-site service:Provideon-site maintenance,technical support and other services;Inspection service:Provide regular return visitsand inspection services;Stagnation service:Provide long-term stagnation services required for the project.
Purchasing Request
Note: Send your purchase request, and we will screen suppliers or manufacturers for you free of charge...