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China, Chinese Lab 6kw Microwave Plasma Chemical Vapor Deposition Mpcvd Diamond Machine1 Industrial Products Supplier Manufacturer Details, price list catalog:
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Laboratory InstrumentsLaboratory Heating EquipmentMpcvd MachineDiamond Making Machine
Jinan ACME Power Supply Co., Ltd.
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Product Description Jinan ACME MW1070 MPCVD MachineVacuumVacuum measurementPiezoresistive gauge 0.1-100kpa Capacitance gauge 0-1000PaOperating pressure range4-28KpaVacuum leakage rate≤ 5 * 10-9Pa.M3/S (He leak detection)Pressure controlAuto-ControlCavity materialAluminum alloy excitation chamber, quartz vacuum chamberObservation windowTemperature measuring hole with diameter of 10mm and observation window of porous holeCooling modeCooling modeWater cooling+chamber air coolingSample table sizeMolybdenum stage Φ 70mm, uniform area Φ 50mmTemperature measurementInfrared thermometer, range 300-1400 oCCooling water flow>50L/minCooling water temperature20-22oCCooling water interface1-inch outer wire interfaceOperating systemOperating systemPLC control, 15 inch touch screen controlProcess Menu10 process menus, 25 lines for eachMicrowave and power supplyMicrowave frequency2.45±0.1GHzOutput power1.5-7.5Kw (equipped with 10kw domestic microwave power supply)Input power electricity380 Ac/50Hz, three-phase five wire (3 * 10+2 * 6 power line),>15KwMicrowave leakage rateMicrowave leakage rate 5cm away from the equipment ≤ 5Mw/cm2Process gasFlowmeter and interfaceH2 (1000SCCM) CH4 (50SCCM) N2 (10SCCM) O2 (10SCCM) 1/4 "VCR female compressed air 8mm Pu tube quick plugThe flowmeter can change the type of gas used through softwareAir supply pressure0.3-0.35MPaCompressed air pressure0.5-0.6MPaVacuum pumpRotary vane vacuum pumpOil pumpPumping speed4L/SPower supplyAc 380V(±10%)InterfaceAir extraction KF25, air exhaust KF25Operating environmentAmbient temperature and humidityThe room temperature is lower than 26 oC and the humidity is lower than 40%Overall dimensions of equipmentSize1250(L)×800(W)×2100(H)mmEquipment appearance Equipment acceptance conditions:1. Equipment installation: After the equipment installation is completed, Party A and Party B shall conduct on-site commissioning, and Party B's technicians shall conduct equipment operation, safety and maintenance training for the person in charge of Party A.2. System test: The system can be started and operated normally, and the detached fireball is stable without jumping.3. Microwave leakage: the microwave leakage is less than 5mW/cm2 (the output power of the microwave source is more than 80%, 10cm away from the equipment)
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