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China, Chinese 1100c 1200c 1400c High-Efficiency Electric Annealing Vacuum Furnace for Lab Metal Heat Treatment1 Industrial Products Supplier Manufacturer Details, price list catalog:
China Industrial Products Supplier Manufacturer List Catalog
Laboratory InstrumentsLaboratory Heating EquipmentAnnealing FurnaceHeat Treatment Furnace
HENAN RUNJING INSTRUMENT EQUIPMENT CO.,LTD
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Product Description Introducing the Vacuum RTP (Rapid Thermal Processing) Annealing Furnace, a marvel in high-vacuum, fast-heating tubular technology. This cutting-edge furnace is adorned with a sophisticated quartz chamber and vacuum flanges, fundamentally elevated by its halogen lamp heating system, propelling it to achieve breathtaking heating rates up to 50°C per second. It is distinguished by its PID automatic control capabilities, featuring 30 programmable segments.Meticulously engineered for the annealing of semiconductor or solar cell substrates, this high-temperature tubular furnace fosters rapid thermal processing in vacuum or meticulously controlled atmospheric environments. It finds extensive applications within university laboratories and pioneering industrial research facilities for specialized applications including:Thin-film depositionExpedient annealing across diverse materialsSilicidationDiffusionCrystallizationDensificationParameter2-inch Wafer4-inch Wafer6-inch WaferWafer Size2 inches4 inches6 inchesFurnace Tube Outer Diameter100 mm110-150 mm180 mmHeating Zone Length200 mm300 mm400 mmImportant Note: We offer customization of other sizes tailored to customer specifications.Product DetailsFeatureSpecificationProduct NameRTP Rapid Annealing FurnaceOperating Temperature900°CControllerLED (Touchscreen LED optional)Furnace ChamberOpen-type, sliding rail designTube SizeCustomizable based on requirementsHeating ElementHalogen lampsHeating Rate0-50°C/sThermocoupleCustom-designed based on actual needsTemperature Controller30-segment high-precision digital programmable controllerThis innovative sliding tube furnace, equipped with dual sliding rails at its base, hosts two tube furnaces that glide effortlessly left and right, facilitating rapid cooling. It excels in processing samples under diverse environmental conditions such as vacuum, atmospheric, and air scenarios. Predominantly employed in rapid annealing, silicidation, diffusion, crystallization, densification, and more for a multitude of materials.ParameterSpecificationDisplayLEDTemperature1200°CContinuous Operating Temp≤1100°CHeating RateRecommended 0-10°C/minFurnace TubeTube Dimensions: OD50/ID44 × L1800mm First Furnace: Heating Zone Length: 350mm Second Furnace: Heating Zone Length: 150mm (Other sizes customizable based on customer requirements)Heating ElementMolybdenum Disilicide (MoSi) Heating WireSliding Rails/TableChrome-Plated Steel Dual Rails, Sliding Length: 1800mm (Other sizes customizable based on customer requirements)ThermocoupleType NTube MaterialHigh-Purity QuartzSealing FlangeStainless Steel Water-Cooled KF25 Flange (with mechanical vacuum gauge port)Temperature Accuracy±1°CTemperature ControlTwo Independently Controlled Furnaces - 30-step PID Auto Control via SCR Power RegulationThe state-of-the-art sliding three-zone tube furnace boasts an 80mm outer diameter quartz tube and can achieve temperatures soaring up to 1200°C. Its design, featuring a pair of sliding rails, allows for seamless movement of the furnace from one end of the tube to the other, optimizing rapid heating and cooling.To maximize heating efficiency, preheat to your desired temperature before gliding it over the sample. For swift cooling, simply slide the furnace away post-heating.This system stands as an exceptional, cost-effective solution for rapid thermal processing (RTP).ParameterSpecificationShell StructureDouble-layer air-cooledFurnace Chamber MaterialAlumina refractory fiberMax Temperature1200°COperating Temperature1100°CHeating Rate10°C/minHeating ElementResistance wireTemperature ControlPID temperature regulation, supports 30-segment heating/cooling programs, with over-temperature and thermocouple break protectionThermocoupleType NHeating Zone Length220mm + 220mm + 220mm (other sizes customizable upon request)Furnace Tube Size?80mm × 2400mm (other sizes customizable upon request)Furnace TubeHigh-purity quartz tubeSliding RailsChrome-plated steel dual railsRail Length~2500mm (other sizes customizable upon request)Flange304 stainless steel sealing flange with silicone O-ring, easy assembly, reusableCompatible GasInert gas (slight positive pressure)This bespoke RTP (Rapid Thermal Processing) annealing furnace is comprised of an RTP sliding-rail tube furnace, augmented by a sophisticated multi-channel mass flow controller system, and a robust vacuum system, purposefully crafted for annealing semiconductor wafers, solar cells, or comparable samples (up to 3" in size).The tube furnace advances with innovative infrared lamp heating, enabling ultra-rapid heating rates of 50°C per second. It showcases 30-segment precision temperature control with remarkable accuracy of ±1°C. Outfitted with an RS485 interface and accompanying control software, the furnace offers comprehensive computer-based operation and monitoring, complete with real-time temperature curve displays.Discover the cutting-edge RG Customized RPT Vacuum Rapid Thermal Annealing Furnace, a hallmark of Henan Runjing Instrument Equipment Co., Ltd, designed for superior rapid thermal processing in a tube furnace setting. This advanced apparatus is widely revered for its versatile applications, providing unmatched performance and efficiency. Specially engineered to facilitate large-area 2D graphene growth via Chemical Vapor Deposition (CVD), it stands as a beacon of innovation and precision. Our furnace is meticulously optimized for high-performance uses, ensuring reliability and excellence. It excels in semiconductor and solar cell wafer annealing, setting a new standard for industry applications.Efficiently managed, the furnace's operations are controlled by a sophisticated computer system in real-time. This is achieved through the RS485 interface and dedicated software, providing seamless integration and control.Furthermore, it allows for the visualization of temperature profiles, enhancing operational precision and user experience.ParameterSpecificationProduct NameOpen-Type Dual-Zone RTP Tube FurnaceOperating Temperature≤1000oCControllerLCD Touch ScreenFurnace Tube SizeQuartz Tube OD80mm/ID72mm, Single-End Open (Custom sizes available)Heating Zone300mm (Custom lengths available)Furnace TypeOpen-TypeHeating ElementHalogen Lamp HeatingHeating Rate30oC/minTemperature SensorType N ThermocoupleTemperature Controller30-Segment High-Precision Digital Programmable ControllerPart 2: Gas Mixing System - An essential component for controlled atmospheric conditions, ensuring optimal processing environments.ParameterSpecificationFlow RangeMFC1: Argon (O) 0-200sccmMFC2: Argon (Ar) 0-200sccmPart 3: Vacuum System - Integral for maintaining purity and precision, enabling superior material treatment.ComponentSpecificationVacuum PumpRotary Vane PumpAccessoriesExhaust Filter + Corrosion-Resistant Digital Vacuum GaugeOur rapid annealing furnace features vacuum flanges on both ends of the furnace tube, achieving a vacuum level of 10-5 Torr with a molecular pump and 10-3 Torr with a mechanical pump. Equipped with sliding rails for manual movement, it achieves exceptional heating and cooling rates of up to 100°C per minute. For rapid transitions, preheat the furnace to the desired temperature before positioning at the sample location. Post-heating, swiftly relocate to the opposite end for cooling. Under vacuum or inert gas, achieve heating and cooling rates up to 10°C per second. This makes it an ideal, cost-effective solution for rapid thermal processing, pushing the boundaries of technological advancement.ParameterSpecificationFurnace Tube DimensionsΦ60mm × 1500mm (Customizable per customer requirements)Heating Zone Length440mm (Customizable per customer requirements)Operating Temperature≤1100°CMaximum Temperature1200°CTemperature Control System30-segment PID microcomputer programmable control (Optional LCD touchscreen display)Temperature Control Accuracy±1°CTemperature ProtectionOver-temperature and thermocouple break protectionHeating Rate0~10°C/minHeating ElementResistance wireGas Tightness4.03 × 10<sup>-3</sup> PaFurnace Chamber MaterialJapanese imported chamber material, no powdering, excellent insulation, high reflectivity, uniform temperature distribution, strong resistance to thermal expansion and contractionSlide Rail DimensionsHeavy-duty steel bidirectional slide rails, sliding length: 1200mm (Customizable per customer requirements)Flange ConnectionsStandard with two stainless steel vacuum flanges, pre-installed mechanical pressure gauge and stainless steel shut-off valveSealing SystemSilicone O-ring compression seal between furnace tube and flange, easy disassembly, reusable, excellent airtightness (ensures pressure gauge remains stable for 12 hours)Furnace Tube OptionsFused quartz tube or alumina tubeTemperature SensorType N thermocouple
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