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IPDB › China Industry › Industrial Equipment & Components

China, Chinese High Thermal Conductivity Al2O3 Alumina Ceramic Base and Nozzles for Semiconductor Process Equipment¹ Industrial Products Supplier Manufacturer Details, price list catalog:

China Industrial Products Supplier Manufacturer List Catalog

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Industrial Ceramic Products Ceramic Tube Rod Alumina Ceramic Base Alumina Ceramic Nozzle

Xiamen Innovacera Advanced Materials Co., Ltd.

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Product Description Alumina ceramic base and nozzles are widely used in semiconductor process equipment such as implanter equipment and electron generator components due to their excellent electrical, thermal and mechanical properties. The Alumina Ceramic Base have very good electrical insulation and high thermal conductivity, these let it play a very important roles in the semiconductor industry. Electron generator components are crucial in semiconductor manufacturing and various high-tech applications, alumina ceramic base and nozzles are key Insulation and Shielding Components in electron generator components. ItemTest ConditionUnit&Symbol95% Al2O399% Al2O399.7% Al2O3The main chemical ingredient Al2O3Al2O3Al2O3Bulk Density g/cm33.63.893.96Maximum Use Temperature 1450°C1600°C1650°CWater absorption %000ROHS Hardness ≥85≥89≥89Flexural strength20° CMPa (psi x 103)358 (52)550550Compressive Strength20° CMPa (psi x 103)2068 (300)2600(377)2600(377)Fracture ToughnessK(I c)Mpa m1/24 - 55.66Coefficient of thermal expansion25-1000° C1X 10-6/°C7.67.98.2Coefficient of thermal conductivity20° CW/m °K163030.4Thermal Shock ResistanceTc°C250200200Dielectricity constant1MHz.25°C 99.79.7Dielectric strength ac-kV/mm (ac V/mil)8.3 (210)8.7 (220)8.7 (220)Volume Resistivity100°Cohm-cm> 1013> 1014> 1014Innovacera Alumina Ceramic Parts including the Alumina Ceramic Bases have a good feedback from many semiconductor manufacturing plants. If you need any customized alumina ceramic base or other customized alumina ceramic part.

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