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China, Chinese Lab 3" Two Zones Css Furnace for Rapid Thermal Processing1 Industrial Products Supplier Manufacturer Details, price list catalog:
China Industrial Products Supplier Manufacturer List Catalog
Laboratory InstrumentsLaboratory Heating EquipmentHeat Treatment FurnaceVacuum Furnace
HENAN RUNJING INSTRUMENT EQUIPMENT CO.,LTD
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Product Description 3" two zones CSS furnace is heated by two group of halogen heaters (Top and Bottom) separately with max. 20oC/s heating rate. Two 30 segment precision temperature controllers are built in with +/-1oC accuracy. RS485 port and control software are included to allow for the operation of furnace and temperature profile logging via PC. It is excellent tool to research new generation thin film for solar cells, such as CdTe, Sulfide, and Perovskite solar cell. 3" two zones CSS furnace for rapid thermal processing specifications:Furnace structure & Vacuum ChamberDual Heater, two temperature controllers, two-channel gas flowmeters are integrated into a mobile aluminum alloy frameThe chamber is made of high purity fused quartz tubeQuartz tube size: 11" OD/10.8" ID×9" HThe vacuum flanges are made of Stainless Steel 316Overall dimension: 850(L)×745(W)×1615(H) mmVacuum FlangesTop Flange with one KFD-25 vacuum port and two gas outlets (1/4" pipe required) can slide up or down manually to load and unload substrate and evaporated material easilyBottom flange has one KFD-25 vacuum port with two gas inlets (1/4" pipe required) and needle valvesFlange is sealed by double silicone o-rings and can achieve maximum vacuum pressure of 10E-2 Torr by a quality mechanical pump and 10E-5 Torr by a molecular pump (vacuum pump is not included, please order separately)Precision anti-corrosion digital vacuum gauge is in standard package.Gas Flow MetersTwo float-meters are installed on the control panel with measurement range of:16 -160 mL/m 400 - 4000 mL/m (for purging purpose) Heater and Sample HolderTwo shortwave IR lamps as heating elements for fast heating.The distance between two heaters is adjustable from 10-50 mmThe heaters are made of stainless steel with water cold jacket to reduce heat radiation and allow for fast cooling.3" round wafer holder is built in with top heater to load substrateOne high thermal conductive AlN plate (3"Dia ×0.5mm Thick) is included, which shall put on the back of substrate to make it heated uniformlyTemperature ControllerTwo precision digital temperature controllers with 30 segments programmable offer independent controlling of top and bottom heatersEach controller has PID auto-tune function to protect heaters from overshooting and alarm function to avoid overheating and thermal couple brokenPC communication interface & software is installed for recording temperature profile.Working TemperatureMaximum temperature for each heater: <= 650oCMaximum temperature difference between two heaters: <= 300oC depends on the spacing between two heaters:Spacing 30mm Max. temp difference: 315oC heating bottom onlySpacing 40mm Max. temp difference: 350oC heating bottom onlySpacing 50mm Max. temp difference: 395oC heating bottom onlyHeating & Cooling RateHeating: < 8oC/s ( heating single heater only )Cooling: < 10oC/s (600 - 100oC) Max.Thermal CoupleTwo K-type thermal couples (exposed) are installed on top and bottom heaters separatelyWorking Voltage208 - 240VAC, single phase, 20A air breakerPower Requirement2200W total ( 1100W for each heater )WarrantyOne year limited with lifetime support (Consumable parts such as quartz tube and heating lamps are not covered by the warranty)
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