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China, Chinese Laboratory Vacuum Furnace for Sintering and Annealing1 Industrial Products Supplier Manufacturer Details, price list catalog:
China Industrial Products Supplier Manufacturer List Catalog
Laboratory InstrumentsLaboratory Heating EquipmentHeat Treatment FurnaceInduction Melting Furnace
HENAN RUNJING INSTRUMENT EQUIPMENT CO.,LTD
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Product Description The Vacuum RTP (Rapid Thermal Processing) Annealing Furnace is a cutting-edge, high-vacuum, fast-heating tubular marvel, boasting a sophisticated quartz chamber and durable vacuum flanges. It harnesses the power of halogen lamp heating, propelling the system to a remarkable rapid heating rate of up to 50°C per second,all while showcasing PID automatic control and offering 30 intelligently programmable segments.Engineered specifically for the annealing of semiconductor or solar cell substrates, this high-performance, high-temperature annealing tubular furnace allows for the rapid thermal processing of samples in either vacuum or meticulously controlled atmospheric environments. It has found widespread acclaim in prestigious university laboratories as well as leading industrial research facilities for diverse applications including:- Thin-film deposition- Rapid annealing of a wide array of materials- Silicidation- Diffusion- Crystallization- DensificationParameter2-inch Wafer4-inch Wafer6-inch WaferWafer Size2 inches4 inches6 inchesFurnace Tube Outer Diameter100 mm110-150 mm180 mmHeating Zone Length200 mm300 mm400 mmNote: We offer customization options to tailor other sizes to your unique requirements.Product DetailsFeatureSpecificationProduct NameRTP Rapid Annealing FurnaceOperating Temperature900°CControllerLED (Touchscreen LED optional)Furnace ChamberOpen-type, sliding rail designTube SizeCustomizable based on requirementsHeating ElementHalogen lampsHeating Rate0-50°C/sThermocoupleCustom-designed based on actual needsTemperature Controller30-segment high-precision digital programmable controllerThis innovative sliding tube furnace is expertly fitted with a pair of sliding rails at the base, featuring two tube furnaces that glide seamlessly on the rails for unparalleled rapid cooling. This RTP rapid annealing furnace is versatile, adept at heating samples in diverse conditions such as vacuum, atmospheric, and air environments, and is perfect for rapid annealing, silicidation, diffusion, crystallization, densification, and more across numerous material types.ParameterSpecificationDisplayLEDTemperature1200°CContinuous Operating Temp≤1100°CHeating RateRecommended 0-10°C/minFurnace TubeTube Dimensions: OD50/ID44 × L1800mm First Furnace: Heating Zone Length: 350mm Second Furnace: Heating Zone Length: 150mm (Other sizes customizable based on customer requirements)Heating ElementMolybdenum Disilicide (MoSi) Heating WireSliding Rails/TableChrome-Plated Steel Dual Rails, Sliding Length: 1800mm (Other sizes customizable based on customer requirements)ThermocoupleType NTube MaterialHigh-Purity QuartzSealing FlangeStainless Steel Water-Cooled KF25 Flange (with mechanical vacuum gauge port)Temperature Accuracy±1°CTemperature ControlTwo Independently Controlled Furnaces - 30-step PID Auto Control via SCR Power RegulationThe ingeniously designed sliding three-zone tube furnace represents a pinnacle of rapid thermal annealing technology, featuring an 80mm outer diameter quartz tube with an impressive maximum temperature threshold of 1200°C. It is equipped with bottom sliding rails, enabling the furnace to traverse across the tube for swift heating and cooling.To optimize the heating process, preheat to your desired temperature and slide the furnace over the sample position. For the most efficient cooling, simply retract the furnace post-heating.This system offers an exceptionally economical solution for high-speed, rapid thermal processing (RTP).ParameterSpecificationShell StructureDouble-layer air-cooledFurnace Chamber MaterialAlumina refractory fiberMax Temperature1200°COperating Temperature1100°CHeating Rate10°C/minHeating ElementResistance wireTemperature ControlPID temperature regulation, supports 30-segment heating/cooling programs, with over-temperature and thermocouple break protectionThermocoupleType NHeating Zone Length220mm + 220mm + 220mm (other sizes customizable upon request)Furnace Tube Size?80mm × 2400mm (other sizes customizable upon request)Furnace TubeHigh-purity quartz tubeSliding RailsChrome-plated steel dual railsRail Length~2500mm (other sizes customizable upon request)Flange304 stainless steel sealing flange with silicone O-ring, easy assembly, reusableCompatible GasInert gas (slight positive pressure)This bespoke RTP (Rapid Thermal Processing) annealing furnace incorporates an RTP sliding-rail tube furnace, a state-of-the-art multi-channel mass flow controller system, and an advanced vacuum system, all meticulously designed for the annealing of semiconductor wafers, solar cells, and other samples up to 3" in size.The tube furnace employs pioneering infrared lamp heating technology, achieving a staggering ultra-fast heating rate of 50°C per second.It is equipped with 30-segment precise temperature control maintaining an impeccable accuracy of ±1°C.Complete with an RS485 interface and user-friendly control software, the system allows for seamless computer operation and monitoring, offering real-time visualization of temperature curves.This state-of-the-art rapid thermal processing tube furnace is extensively utilized for the expansive growth of 2D graphene utilizing the CVD method and is meticulously optimized for the annealing of semiconductor and solar cell wafers. The system is masterfully controlled by a computer that governs the furnace in real-time via the sophisticated RS485 interface coupled with dedicated software, all while providing a comprehensive visualization of temperature profiles.ParameterSpecificationProduct NameOpen-Type Dual-Zone RTP Tube FurnaceOperating Temperature≤1000oCControllerLCD Touch ScreenFurnace Tube SizeQuartz Tube OD80mm/ID72mm, Single-End Open (Custom sizes available)Heating Zone300mm (Custom lengths available)Furnace TypeOpen-TypeHeating ElementHalogen Lamp HeatingHeating Rate30oC/minTemperature SensorType N ThermocoupleTemperature Controller30-Segment High-Precision Digital Programmable ControllerPart 2: Advanced Gas Mixing SystemParameterSpecificationFlow RangeMFC1: Argon (O) 0-200sccmMFC2: Argon (Ar) 0-200sccmPart 3: Efficient Vacuum SystemComponentSpecificationVacuum PumpRotary Vane PumpAccessoriesExhaust Filter + Corrosion-Resistant Digital Vacuum GaugeThe rapid annealing furnace boasts vacuum flanges at both ends of the furnace tube. Achieve a vacuum level as low as 10-5 Torr with the molecular pump and 10-3 Torr with the mechanical pump. A pair of strategically designed sliding rails is installed at the base of the furnace, permitting effortless manual movement. Experience maximum heating and cooling rates of 100°C per minute. For peak heating efficiency, the furnace can be preheated to a designated temperature before being relocated to the sample position. For swift cooling, after heating the sample, the furnace can be shifted to the opposite end. Under vacuum or inert gas conditions, the heating and cooling rates can soar to 10°C per second, rendering it an exceptional low-cost solution for rapid thermal processing.ParameterSpecificationFurnace Tube DimensionsΦ60mm × 1500mm (Customizable per customer requirements)Heating Zone Length440mm (Customizable per customer requirements)Operating Temperature≤1100°CMaximum Temperature1200°CTemperature Control System30-segment PID microcomputer programmable control (Optional LCD touchscreen display)Temperature Control Accuracy±1°CTemperature ProtectionOver-temperature and thermocouple break protectionHeating Rate0~10°C/minHeating ElementResistance wireGas Tightness4.03 × 10<sup>-3</sup> PaFurnace Chamber MaterialJapanese imported chamber material, no powdering, excellent insulation, high reflectivity, uniform temperature distribution, strong resistance to thermal expansion and contractionSlide Rail DimensionsHeavy-duty steel bidirectional slide rails, sliding length: 1200mm (Customizable per customer requirements)Flange ConnectionsStandard with two stainless steel vacuum flanges, pre-installed mechanical pressure gauge and stainless steel shut-off valveSealing SystemSilicone O-ring compression seal between furnace tube and flange, easy disassembly, reusable, excellent airtightness (ensures pressure gauge remains stable for 12 hours)Furnace Tube OptionsFused quartz tube or alumina tubeTemperature SensorType N thermocouple
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