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China, Chinese Plasma Enhanced CVD System Pecvd Graphene Machine With13.56 MHz RF Power1 Industrial Products Supplier Manufacturer Details, price list catalog:
China Industrial Products Supplier Manufacturer List Catalog
Laboratory InstrumentsLaboratory Heating EquipmentPecvd SystemPlasma Enhanced CVD System
Zhengzhou Tainuo Film Materials Co., Ltd.
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Product Description Plasma Enhanced CVD System PECVD Graphene Machine With13.56 MHz RF Power Product Description 1. The PECVD system comes with a plasma generator, a triple-heating zone tube furnace, a single-heating zone tube furnace, an RF power supply, and a vacuum system.2.The PECVD graphene film preparation device ionizes a gas containing a film constituent atom by means of a RF output of 13.56 Mhz, forms a plasma in a vacuum chamber, utilizes strong chemical activity of the plasma, improves reaction conditions, and utilizes plasma activity to promote the reaction, then deposits a desired film on the substrate.3. This PECVD system can be used in graphene preparation, sulfide preparation, and nanometer material preparation. Various films such as SiOx, SiNx, amorphous silicon, microcrystalline silicon, nano-silicon, SiC, diamond-like, etc. can be deposited on the surface of a sheet or similar shaped sample, and p-type and n-type doped films can also be deposited. The deposited film has good uniformity, compactness, adhesion, and insulation. It is widely used in the fields of cutters, high-precision molds, hard coatings, high-end decoration, etc.Product ParametersSpecifications of PECVD systemVacuum tube furnaceModelTN-PECVD50-1200-QTube materialHigh purity quartzTube diameter50mmTube length1000mmFurnace chamber length660mmHeating zone length200mm+200mm+200mmOperating temperature0~1100oCTemperature control accuracy±1oCTemperature control mode30 or 50 segment program temperature controlDisplay modeLED (highlight digital tube display)Sealing method304 stainless steel vacuum flangeFlange interface1/4" cutting sleeve joint (?8 pagoda joint)Vacuum4.4×10E-3PaPower supplyAC:220V 50/60HzGas supply systemModelTN-3FGas channel3-channelMeasuring unitGas float flowmeterMeasuring rangeA channel: 0~100ml H2 gasThe flow meter of the corresponding gas type and range can be selected according to customer's requirementsB channel: 16~160ml N2 gasC channel: 25~250ml Ar gasmeasurement accuracy±2.0%Pipe pressure resistance3MPaWorking pressure difference50~500KPaConnecting pipe304 stainless steelGas channel304 stainless steel needle valveInterface specification1/4" cutting sleeve joint for gas inlet and outletExhaust systemMechanical pumpGHD-031BPumping rate4L/S Exhaust interfaceKF16Vacuum measurementPirani gaugeUltimate vacuum1×10E-1PaPower supplyAC:220V 50/60HzPumping interfaceKF40 Detailed Photos1. WE have CVD/PECVD machine with gas supply system+vacuum system+tube furnace + plasma generator.2. Tube furnace (temperature) :1200C, 1400C, 1600C, customized temperature is avaliable.3. Tube furnace (heating zone) :single zone, dual zone, triple zone, customized No. of heating zone is avaliable.4. Tube Material: quartz, corundum, alloy, and other material of tube is customizable.5. Tube with different diameter and length is customizable.6. Plasma generator: 100W, 150W, 300W, 500W, 1000W, and other power of plasma generator is customizable.7. Flowmeter: 1~3 or multi channel flow meter is optional based on your process.Company ProfileZhengzhou Tainuo Film Materials Co., Ltd. is a comprehensive company integrating design, research and development, production and sales.Our company's main products are: spin coater, thermal evaporation coater, magnetron sputter coater, plasma sputter coater, E-beam evaporation coater, PLD pulse laser coating machine, plasma cleaner, CVD system, PECVD system, diamond wire cutting machine, melting furnace/stove, arc melting furnace, etc.Our products are widely used in the field of materials science research. We have extensive cooperation with domestic universities, laboratories, and new material companies. It has been successfully exported to more than 20 countries and regions including the United States, the United Kingdom, Germany, Russia, Switzerland, Canada, Brazil, etc. and have established long-term cooperative relationships with local dealers.If you are conducting materials research, please contact us and we will provide you with customized services to make your research experiments smoother!Packaging & ShippingWe can ship the CVD, PECVD machine by sea, by air, by land and by Express, also we can arrange shipment according to your requirements.FAQQ. Are you manufacturer or trading company?A. We are professional manufacturer of laboratory instruments, We have professional R&D team and workshop, which can promise the qulaity and after-sale service. Q. How's your warranty?A. Our warranty is 12 months, and provide lifetime maintenance. We provide 24 hours on-line service.Q. How long is your delivery time? If I want to customize the instrument, how long does it take?A. 5-10 days----in store. Customzied products---It usually takes 30-60 days depending on your requirements.Q. Power supply and plug?A. We can provide products accroding to your local voltage and plug standard.Q. How to pay?A. T T, L / C, D / P, etc.Q. How is the package of goods? Delivery methods?A. Standard export fumigation sign wooden box packaging or as your requirements.Contact UsSHALL WE DISCUSS YOUR PROJECT?Please get in touch and we can collaborate to get you the answers and solutions you need.How can we help you achieve your goals? What technical obstacles can our engineering team help you overcome? Please press the 'Get in Touch' button to get in contact with us, we'd be excited to hear about your research and help you in any way we can.
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