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China, Chinese Vacuum Plasma Cleaner for Semiconductor IGBT Module Mems1 Industrial Products Supplier Manufacturer Details, price list catalog:
China Industrial Products Supplier Manufacturer List Catalog
Laboratory InstrumentsLaboratory CentrifugeVacuum Plasma Cleaning MachineVacuum Plasma Cleaner
Termway (Beijing) Precision Technology Co., Ltd.
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Product Description Vacuum Plasma Cleaner for semiconductor IGBT module MEMSI. Equipment name, type number, origin and delivery date1.1 Equipment name: Inline vacuum plasma cleaning machine1.2 Model No.: VPC3i1.3 Origin (country, manufacturer): Beijing Torch SMT Incorporated Company1.4 Delivery date: 4-8 weeks after the contract comes into effect1.5 Mainly used for plasma surface treatment process in semiconductor enclosure fields such as silicon wafer, glass substrate, ceramic substrate, IC carrier plate, copper lead frame, large-size single-sided substrate power board, IGBT module, MEMS sensor with fixture, microwave device, filter, RF device, etc.II Main technical performance parameters:2.1 volume of vacuum chamber: 3L2.2 vacuum degree:The maximum vacuum degree of VPC3i vacuum plasma cleaner is less than 10 Pa (mechanical dry pump 8L)2.3 Effective cleaning area:Single cleaning area: 350 * 100 * 85mmPlasma frequency: 13.56hz 300W RF (volume treatment, with water cooling)2.4 Height of vacuum chamber:Furnace height: 100mm (effective size)2.5 Cleaning temperature:Low temperature cleaning (below room temperature).2.6 Cleaning frequency: 30-120s2.7 Cleaning effect: the dyne value can reach 70. The water drop angle is 15 degrees, and it can be optimally controlled within 10 degrees(Workshop with air cleanliness at Class 100 dust-free can be cleaned within 4 hours)2.8 Gas can be used:Argon, nitrogen, oxygen, nitrogen hydrogen mixture, hydrogen and formic acid, etc.Company InformationShow Room
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