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China, Chinese Semiconductor Device Fabrication Fab Wafer Fabrication Etching Inductively Coupled Plasma Etching Machine Icp for Si/Sio2/Sinx/ Sic Beol Feol1 Industrial Products Supplier Manufacturer Details, price list catalog:
China Industrial Products Supplier Manufacturer List Catalog
Etching MachineSemiconductor Industry EquipmentPlasma Etching Machine
Guangzhou Minder-Hightech co.,Ltd
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Product Description Inductively coupled plasma etching machine-ICPInductively coupled reactive ion etching technology is a type of RIE. This technology achieves decoupling of plasma ion density and ion energy by independently controlling ion flux, thereby improving the control accuracy and flexibility of the etching process.The high-density inductively coupled reactive ion etching (ICP-RIE) series products are based on inductively coupled plasma technology and are aimed at fine etching and compound semiconductor etching needs. It has excellent process stability and process repeatability, and is suitable for applications in silicon semiconductors, optoelectronics, information and communications, power devices, and microwave devices.Applicable Materials:1. Silicon-based materials: silicon (Si), silicon dioxide (SiO2), silicon nitride (SiNx), silicon carbide (SiC)...2. III-V materials: indium phosphide (InP), gallium arsenide (GaAs), gallium nitride (GaN)...3. II-VI materials: cadmium telluride (CdTe)...4. Magnetic materials/alloy materials5. Metal materials: aluminum (Al), gold (Au), tungsten (W), titanium (Ti), tantalum (Ta)...6. Organic materials: photoresist (PR), organic polymer (PMMA/HDMS), organic thin film...7. Ferroelectric/photoelectric materials: lithium niobate (LiNbO3)...8. Dielectric materials: sapphire (Al2O3), quartz...Related applications:1. Grating etching: used for 3D display, micro-optical devices, optoelectronics, etc.;2. Compound semiconductor etching: used for LED, laser, optical communication, etc.;3. Patterned sapphire substrate (PSS);4. Lithium niobate (LiNO3) etching: detectors, optoelectronics;Application results:ItemMD150S-ICPMD200S-ICPMD150CS-ICPMD200CS-ICPMD300C-ICPProduct size≤6 inches≤8 inches≤6 inches≤8 inchesCustom≥12inchesSRF Power source0~1000W/2000W/3000W/5000WAdjustable,automatic matching\,13.56MHz/27MHzBRF Power source0~300W/0~500W/0~1000WAdjustable, automatic matching,2MHz/13.56MHzMolecular pumpNon corrosive : 600 /1300 (L/s)/CustomAnti-corrosion:600 /1300 (L./s)/Custom600/1300(L/s) /CustomForeline pumpMechanical pump / dry pumpAnti corrosion dry pumpMechanical pump / dry pumpPre pumping pumpMechanical pump / dry pumpMechanical pump / dry pumpProcess pressureUncontrolled pressure/0-0.1/1/10Torr controlled pressureGas typeH2/CH4/O2/N2/Ar/SF6/CF4/CHF3/C4F8/NF3/NH3/C2F6/Custom(Up to 12 channels, no corrosive & toxic gas)H2/CH4/O2/N2/Ar/SF6/CF4/CHF3/ C4F8/NF3/NH3/C2F6/Cl2/BCl3/HBr/Custom(Up to 12 channels)Gas range0~5sccm/50sccm/100sccm/200sccm/300sccm/500sccm/1000sccm/CustomLoadLockYes/NoYesSample tem control10°C~Roomtem/ -30°C~150°C /Custom-30°C~200°C/CustomBack helium coolingYes/NoYesProcess cavity liningYes/NoYesCavity wall tem controlNo/Room tem-60/120°CRoom tem~60/120°CControl SystemAuto/customEtching materialSilicon-base: Si/SiO2/SiNx/ SiC.....Organic materials:PR/Organicfilm......Silicon-base: Si/SiO2/SiNx/SiCIII-V: InP/GaAs/GaN......IV-IV: SiCII-VI: CdTe......Magnetic material / alloy materialMetallic materials: Ni/Cr/Al/Cu/Au...Organic materials: PR/Organic film......Silicon deep etchingReal Shoots:Minder-Hightech is sales and service representative in semiconductor and electronic product industry equipment. Since 2014,the company is committed to providing customers with Superior, Reliable, and One-Stop Solutions for machinary equipment. FAQ1. About Price:All of our prices are competitive and negotiable. The price varies depending on the configuration and customization complexity of your device.2. About Sample:We can provide sample production services for you, but you may provide some fees.3. About Payment:After the plan is confirmed, you need to pay us a deposit first, and the factory will start preparing the goods. After the equipment is ready and you pay the balance, we will ship it.4. About Delivery:After the equipment manufacturing is completed, we will send you the acceptance video, and you can also come to the site to inspect the equipment.5. Installation and Debugging:After the equipment arrives at your factory, we can dispatch engineers to install and debug the equipment. We will provide you with a separate quotation for this service fee.6. About Warranty:Our equipment has a 12-month warranty period. After the warranty period, if any parts are damaged and need to be replaced, we will only charge the cost price.7. After-sale ServiceAll machines have a warranty period of over one year. Our technical engineers are always online to provide you with equipment installation, debugging, and maintenance services. We can provide on-site installation and debugging services for special and large equipment.
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