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China, Chinese Lab Single Target Magnetron Sputtering Coater with Tiltable Sample Stage1 Industrial Products Supplier Manufacturer Details, price list catalog:
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Spraying Machinery Spreading EquipmentThermal Spray EquipmentPowder Coating MachinePowder Coating
HENAN RUNJING INSTRUMENT EQUIPMENT CO.,LTD
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Product Description This equipment is a single-target magnetron sputtering coater with a tiltable sample stage. The angle between the sample stage and the target surface is adjustable, and magnetron sputtering coater can be used to make films with specific growth angles. The appearance of the equipment is desktop level, which greatly reduces the installation site requirements. The equipment is equipped with a DC power supply, which can be used for sputtering of metal and other conductive materials. The vacuum system of the equipment adopts turbomolecular pump group, which has fast pumping speed, high ultimate vacuum degree and excellent vacuum performance. This equipment has a compact structure and perfect functions and is easy to use, and is very suitable for various coating tests.magnetron sputtering coater technical parameters:product namesingle target magnetron sputtering coater with tiltable sample stageProduct numberRJ-MSZ180-60Q-I-DC-Qsample stageDimensionsφ60mmHeating temperature<=500oCAdjustable speed<=20rpmMagnetic target gunEquipped with a two-inch magnetic control target, target size: diameter 50.8mm, thickness <=3mmvacuum chamberCavity sizeφ180mm X150mmobservation windowomnidirectionally transparentCavity materialHigh purity quartzLower flangeContains sample stage tilt mechanism and rotation mechanismOpening methodRemovable top coverVacuum systemBacking pumpLow noise bipolar rotary vane pumpMolecular pumpLow noise and high pumping speed turbomolecular pumpVacuum measurementComposite vacuum gauge, range: 10-5~105PaAir extraction interfaceKF16Air extraction interfaceKF40Exhaust interfaceKF16System vacuum1.0×10-4PaPower supplyAC 220V 50/60HzPumping rateThe pumping speed of the molecular pump is 600L/s, and the pumping speed of the backing pump is 1.1L/s.Power configurationNumber of power suppliesA set of DC power supplyOutput Power300WOther parametersSupply voltageAC220V,50HzTotal power2kWOverall size550mm X 350mm X400mm
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