IPDB › China Industry › Manufacturing & Processing Machinery › Spraying Machinery & Spreading Equipment
China, Chinese Lab Powder Coating Equipment Single-Target Magnetron Sputtering Coating Machine1 Industrial Products Supplier Manufacturer Details, price list catalog:
China Industrial Products Supplier Manufacturer List Catalog
Spraying Machinery Spreading EquipmentPowder Coating MachinePowder Coating
HENAN RUNJING INSTRUMENT EQUIPMENT CO.,LTD
Preview:
Product Description RJKY-300-1HD single target magnetron sputtering coater is a high vacuum coating equipment independently developed by our company. It can be used to prepare monolayer or multi-layer ferroelectric film, conductive film, alloy film, semiconductor film and so on. The instrument is equipped with a magnetron sputtering target with a water-cooled interlayer and a 140mm heatable rotary object stage. The vacuum chamber adopts the top opening method, which makes it easier to change the target, and it is an ideal device for making various metal films. It is an ideal equipment for the preparation of films of various materials in the laboratory.RJKY-300-1HD single target magnetron sputtering coater specifications:Product nameSingle target magnetron sputtering coaterProduct modelRJKY-300-1HDInstallation conditionsThis equipment is required to be used at the altitude of 1000m or less, the temperature of 25oC± 15oC, and the humidity of 55% Rh ± 10% Rh.1. Water: The equipment is equipped with a self-circulating chiller (filling pure water or deionized water)2. Electricity: AC220V 50Hz, must have a good ground connection.3. Gas: The equipment chamber needs to be filled with argon gas (purity of 99.99% or more). Self-provided argon gas cylinder (with ?6mm double ferrule joint) and pressure reducing valve4. Workbench: size 650mm × 600mm × 700mm, bearing more than 200kg5. Ventilation device: needMain features1. Configure a single target gun, and a matching DC power supply for sputter coating of conductive materials.2. It can prepare a variety of films, and has a wide range of applications.3. It is small in size and easy to operate.Technical parameters1. the power supply voltage: 220V 50Hz2. rated power: 1200W (excluding vacuum pump)3. Working vacuum degree: 10-4Pa4. Working temperature: RT-500oC, accuracy ± 1×(you can increase the temperature according to actual needs)5. the number of target guns: 16. target gun cooling method: water cooling7. Target size: ?2'', thickness 0.1-5mm (different thickness depending on target material)8. DC sputtering power: 500W (optional)9. RF sputtering power: 300W / 500W (optional)10. loading sample table: ?140mm11. the sample table speed: adjustable within 1rpm-20rpm12. Protective gas: inert gases such as Ar and N213. Intake gas path: mass flow meter controls 2 channels of intake air, flow rate is 200SCCMProduct specificationMain unit size: 500mm × 560mm × 660mm, the whole machine size: 1300mm × 660mm × 1200mm; weight: 160kgStandard accessories1DC power control system12Film thickness monitor system13Molecular pump14Chiller15Cooling water pipe (?6mm)4Optional accessoriesVarious targets such as gold, indium, silver, and platinumAfter-sales serviceAfter the goods are delivered, RJKY provides one year of free after-sales service. The service method is limited to remote technical support such as telephone guidance, video guidance, mail guidance, and accessories mailing. If the customer needs to send someone to provide door-to-door service, the customer shall pay the travel expenses and wages of the service personnel during the business trip.
Purchasing Request
Note: Send your purchase request, and we will screen suppliers or manufacturers for you free of charge...