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China, Chinese TMAXCN Brand- VTC-3HD-VP 3 Heads RF/DC Plasma Sputtering Coater Coating Machine for Powders with 1 PPM Gas Purification System1 Industrial Products Supplier Manufacturer Details, price list catalog:
China Industrial Products Supplier Manufacturer List Catalog
Metal Coating MachineryPlasma Sputtering CoaterPlasma Sputtering Coating Machine
Xiamen Tmax Battery Equipments Limited
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Product Description 3 Heads RF/DC Plasma Sputtering Coater Coating Machine for Powders with 1 PPM Gas Purification System - VTC-3HD-VP VTC-3HD-VP is a three-head 1" RF Plasma magnetron sputtering system designed for powder coating to form various core cells structure. DC and RF power sources are included for coating both metallic and insulation material. The vibration sample holder is built inside the chamber to make powder jumping during the coating, and the gas purification system is used to replace turbopump and provide O2 and H2O less than 1 ppm environmental fro better quality coating. SpecificationsInput PowerSingle-phase 220VAC +/- 10%, 50 / 60 Hz2000 W (including a vacuum pump and water chiller)If the voltage is 110 V, a 3000 W transformer can be ordered at LITHSource Power Three sputtering power sources are integrated into one control boxDC source: 500 W power for coating metallic materials (Pic 1)RF source: 300 W power, 13.56 MHz frequency for coating non-conductive materials (Pic 2)Magnetron Sputtering Head Three 1" magnetron sputtering heads with water cooling jackets are included and inserted into the quartz chamber via quick clampsRF cable replacement can be purchased at LITHOne manually operated shutter is built on the flange 16 L/min recirculating water chiller is included for cooling sputtering headsSputtering TargetTarget size requirement: 1" diameter x 1/8" thickness maxSputtering distance range: 50 - 80 mm adjustableSputtering angle range: 0 - 25° adjustable 1" diameter Cu target and Al2O3 target are included for demo testingVarious oxide 1" sputtering targets are available upon request at extra costFor target bonding, 1 mm and 2 mm copper backing plates are included. Silver epoxy and extra copper backing plates can be ordered at MTIVacuum Chamber Vacuum chamber: 256 mm OD x 238 mm ID x 276 mm Height, made of high purity quartzSealing flange: 274 mm Dia. made of Aluminum with high-temperature silicone O-ringStainless steel shield cage is included for 100% shielding of RF radiation from the chamberMax vacuum level: 1.0E-5 Torr with turbopump and chamber baking Vibration Sample HolderThe amplification of vibration is adjustable from 400 - 2000 RPM in terms of motor speedOne 2" powder reservoir (cup shape) is on the vibration motor. Powder bounce and self rotate during the coating process.Suggested powder quantity: 5 - 20 mlSuggested particle size: 1 ~ 1000 microns ( Powder must be vacuum dry before coting)The sample stage of blade mixing is available upon request for the larger amount of powderGas Purification SystemMTI innovative technology-- using a gas purification system to replace turbopump to get battery coating.Two-columns of Molecular sieves are Built-in in the system. which can remove oxygen and humidity less than < 1 PPMRegeneration Temperature Controlleris built-in for automatically regenerating the filtersAutomatically purging function is built-in for quick reducing O2 < 200ppm & H2O < 50 ppm before recycling.The automatic pressure control system is built in to keep the pressure at a constant level6" color PLC touch panel is included which can set and display the humidity and pressure level.After purification with O2 & H2O < 1 PPM, the chamber pressure can be set up a suitable vacuum level ( 50 - 100 m-torr) for sputtering, which is much better than 10-5 torr vacuum.OptionalPrecise quartz Film Thickness Monitor is optional, which can be into the chamber to monitor coating thickness with an accuracy of 0.10 ?ComplianceCE approvalNRTLcertification is available upon request at extra cost.OptionalThis coater may be placed into a standard glovebox with modification for air-sensitive materials. (Pic. 1)larger 3 head coater with 12" Vac. chamber, 8" dia. sample order, and 3x 2" sputtering guns, is available upon request (Pic. 2) Product Image Certifications
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