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China, Chinese Simvaco Functional Inline PVD Magnetron Sputtering Machine for ITO Glass1 Industrial Products Supplier Manufacturer Details, price list catalog:
China Industrial Products Supplier Manufacturer List Catalog
Metal Coating MachineryITO PVD Coating MachineITO Glass PVD Sputtering System
Zhejiang Shengbo Intelligent Equipment Co., Ltd.
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Product Description The SIMVACO ITO Flat Glass Coating Machine is engineered for depositing high-quality Indium Tin Oxide (ITO) films on flat glass substrates. Designed for industrial applications such as touchscreens, OLED displays, anti-reflective glass, EMI shielding, and thin-film solar cells, the system ensures uniform optical transparency, stable electrical conductivity, and strong film adhesion.Key FeaturesVertical Loading & TransportFlat glass panels are conveyed vertically, minimizing particle contamination.Precision rollers or belts maintain substrate integrity throughout the coating process.Modular Chamber DesignFlexible chamber configuration to meet specific ITO coating requirements:Pre-heating chamberPlasma cleaning/activation chamberMulti-cathode sputtering deposition chamber (DC/MF/RF)Cooling and unloading sectionMulti-Cathode SputteringMain coating: ITO (Indium Tin Oxide)Additional layers: SiO2, TiO2, Nb2O5, ZnO for optical tuningOptional Ag layers for enhanced conductivity or reflectivityAdvanced Vacuum SystemMulti-stage pumping: rotary vane pumps, roots blowers, turbo-molecular pumpsBase vacuum: ≤ 5 × 10-4 Pa; Process vacuum: 1-5 × 10-1 PaEnsures uniform film deposition and high-quality ITO layersProcess Control & MonitoringPLC + HMI touchscreen with recipe storage and full process loggingIn-situ monitoring: ellipsometry, optical monitoring, sheet resistance measurement, QCMClosed-loop feedback maintains consistent thickness, conductivity, and film qualityCoating PerformanceFilm uniformity: ±2% over large-area substrates (up to 1500 mm width)Deposition rate: up to 60 nm/minAdhesion: ≥ 5B (ASTM D3359)Surface roughness: ≤ 1 nmCore AdvantagesHigh Reliability: 24/7 industrial operation with minimal maintenanceCustomizable: Adjustable for substrate size, thickness, and coating recipeCleanroom Compatibility: Low particle generation suitable for Class 1000+ environmentsSpace-Efficient: Vertical design reduces factory footprintApplicationsTransparent conductive ITO films for touchscreens, OLED displays, and EMI shieldingAR/anti-reflective coatings for camera lenses, solar modules, and display glassMulti-layer optical films for smart windows and low-E glassTCO films for thin-film solar cellsDecorative optical coatings for architectural and automotive glassWhy SIMVACO?SIMVACO has over 15 years of deep expertise in the field of vacuum coating and magnetron sputtering. With a strong in-house R&D team, international application experience, and global customer references, we deliver not just machines, but fully customized turnkey coating solutions.
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